Ulvac CRYO-U Series, Instruction Manual, Page: 29 / 106

CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1-3
1.3 Environmental Requirements
Condition Requirement
Temperature when in
operation(*1)
10 - 35 °C
Temperature when not in
operation
-10 - 55 °C
Humidity (*1) 5
～
85% (non-condensing)
Altitude < 1000m
Atmosphere
Free from metallic powder, dust, combustible gas, or
corrosive gas
(*) Depending on the ambient temperature and humidity, dew condensation may form on
an operating cryopump as the surface of the pump case becomes cooler than the
dew-point (Refer to “Appendix F Dew Point Temperature”). Use an air conditioner to
control temperature and humidity to prevent condensation.
◆
Thermometer
・
MBS-C CRYO METER
・
Hydrogen Vapor Pressure Gauge
Charged Pressure
：
0.35
±
0.02MPaG at room temp.
・
K thermocouple Electromotive Force
：
Approximate 0mV at 20ºC
◆
Accessory Flange(C-type)
φ
4
4
.
5
φ
34.9
φ
2
2
2
.
1
7
1.25
7
O ring ＡＳ５６８－０２０
４－φ４．５ hole