CRYO-U
®
Cryopump Instruction Manual
8.
MAINTENANCE
Scheduled and Unscheduled Maintenance ················ 8-1
Consumables ····················································· 8-3
Cleaning the Cryopump ········································ 8-4
Charging Helium Gas ··········································· 8-5
Helium Circuit Decontamination ······························ 8-8
8.1 Scheduled and Unscheduled Maintenance
◇
Scheduled Maintenance
:
Electrical insulation property check of the heater for regeneration
Replacement of maintenance parts in the refrigerator
Replacement of the compressor adsorber
◇
Unscheduled Maintenance
:
Cleaning the cryopump
Adding helium gas
Decontamination of the helium gas line
Calibration of cryometer
Following items and helium gas are necessary for charging helium gas or helium line
decontamination.
Item Volume
Item
code
1
Helium charging adapter kit
(Regulator, Charging hose 2.4M, Charging adopter)
1
A700B5101000
2
<Items independently available>
Regulator (for helium gas)
Charging hose 2.4M
Charging adapter
1
1
1
A700A5101700
A700A5101800
A700B5101100
3
Helium gas (with purity of 99.999% or above)
-
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ULVAC CRYOGENICS INCORPORATED
8-1
Summary of Contents for CRYO-U Series
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