Ulvac CRYO-U Series, Instruction Manual

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CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 5-5
ntity to the Air)
Maximum quantity of gas instantaneously
perature below 20K
Table 5-2 Maximum Quantity of Gas That Can Be Processed Instantaneously
(Guideline Qua
Model processable (Pa•L)
to keep the cryopanel tem
CRYO-U6H 13300
CRYO SP/
U8H-U/U8HL
-U8H/U8H
20000
CRYO-U U10HL 10PU/U10H/ 26600
[Example] W ed and the vacuum chamber volume is 100L, the maximum
allowa ed as follows
† For Your Informati
stored quantity of gas an the regeneration cycle, it is
the actual crossover pressure
hen U8H is us
ble crossover pressure is calculat
on †
In order to restrict the d extend
recommended to control to 40Pa or less.
Maximum allowable crossover
pressure (Pa)
≦
1
=
20000
（
Pa
･
L
）
00
（
L
）
200
（
Pa
）