Ulvac CRYO-U Series, Instruction Manual

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CRYO-U ® Cryopump Instruction Manual
3. QUICK INSTALLATION
This section provides simple installation procedures for users who are already familiar
with cryopump installation and operation.
If more details are required, please refer to the explanation of each section shown in
the table below.
Table 3-1. Quick Installation
Steps Procedures For Details
WARNING
１
２
３
４
５
６
７
８
◆
Do not connect the compressor unit to its power source before the
following installation processes finish.
Mount the cryopump to the vacuum system.
Connect the roughing system, regeneration gas purge unit, and
exhaust duct line to the cryopump.
Connect the cooling water piping to the compressor unit.
Connect the cryopump to the compressor unit with flexible hoses.
In case of remote operation, remote wiring is necessary.
Connect the refrigerator power cable from the cryopump to the
compressor unit.
Connect the input power cable from the compressor unit to its power
source.
Start the cryopump system according to the procedure described in
“Section 5 Operation”.
Section 4.2
Section4.3,
4.4 and 4.5
Section 4.6
Section 4.7
Section 4.8
Section 4.9
Section 4.9
Section 5
MA03001E,2010.01 ULVAC CRYOGENICS INCORPORATED 3-1