Dew Condensation
F-2
ULVAC CRYOGENICS INCORPORATED
2. Dew-Point Temperature
The intersection of temperature and relative humidity indicates the dew point. Dew
condensation occurs when the surface of the cryopump case is below the dew point.
Relative Humidity (%)
20%
30%
40%
50%
60%
70%
80%
85%
90%
10
-12.0
-6.0
-2.6
0.1
2.6
4.8
6.7
7.4
8.4
11
-11.1
-5.9
-2.1
1.0
3.5
5.7
7.7
8.4
9.4
12
-10.3
-5.0
-1.2
1.9
4.5
6.7
8.7
9.4
10.4
13
-9.5
-4.2
-0.3
2.8
5.4
7.7
9.6
10.4
11.4
14
-8.6
-3.3
0.6
3.7
6.4
8.6
10.6
11.3
12.4
15
-7.8
-2.4
1.5
4.7
7.3
9.6
11.6
12.4
13.4
16
-7.0
-1.6
2.4
5.6
8.2
10.5
12.6
13.3
14.4
17
-6.1
-0.7
3.3
6.5
9.2
11.5
13.5
14.3
15.3
18
-5.3
0.2
4.2
7.4
10.1
12.4
14.5
15.2
16.3
19
-4.5
1.0
5.1
8.4
11.1
13.4
15.5
16.3
17.3
20
-3.6
1.9
6.0
9.3
12.0
14.4
16.4
17.2
18.3
21
-2.8
2.8
6.9
10.2
12.9
15.3
17.4
18.2
19.3
22
-2.0
3.6
7.8
11.1
13.9
16.3
18.4
19.2
20.3
23
-1.0
4.5
8.7
12.0
14.8
17.2
19.4
20.1
21.3
24
-0.3
5.4
9.6
12.9
15.8
18.2
20.3
21.4
22.3
25
0.5
6.2
10.5
13.9
16.7
19.1
21.3
22.1
23.2
26
1.3
7.1
11.4
14.8
17.6
20.1
22.3
23.1
24.2
27
2.1
8.0
12.3
15.7
18.6
21.1
23.2
24.1
25.2
28
3.0
8.8
13.2
16.6
19.5
22.0
24.2
24.9
26.2
29
3.8
9.7
14.0
17.5
20.4
23.0
25.2
26.0
27.2
30
4.6
10.5
14.9
18.4
21.4
23.9
26.2
27.0
28.2
* The calculation is based on Sonntag’s equation.
* When the ambient relative humidity is above 85%, dew condensation will form on the
cryopump case.
T
empera
ture
(
°C)
Summary of Contents for CRYO-U Series
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