Ulvac CRYO-U Series, Instruction Manual

Page: 30 / 106

Cryopump Description
1-4 ULVAC CRYOGENICS INCORPORATED
◆
Dimensions
The tables below show basic dime
additional information is required, plea
※
Mounting locations of optional pa
changed according to your reque
Note:
nsional outline drawings of CRYO-U
®
cryopumps. If any
se contact the nearest Customer Support Center.
rts such as a thermometer and an accessory flange may be
st.
UVG flange is equivalent to VG of JIS st
UFC203 and UFC253 flanges are f
[CRYO-U
®
6H]
UVG-150 UFC203
andard.
undamentally based on ISO3669-1986. (Unit: mm)
[
CRYO-U
®
8H
]
Ａ 186 186
Ｂ
509.9 509.9
Ｃ Φ
235
Φ
202.4
Ｄ Φ
165.2
Φ
152.4
UVG-200 6B ANSI UFC253
Ａ
209.6 209.6 209.6
Ｂ
523.7 523.7 523.7
Ｃ Φ
300
Φ
279
Φ
253.2
Ｄ Φ 203.2 Φ 203.2 Φ 203.2
Figure 1-2
External Drawing of CRYO-U
®
Cryopump
68 68
68
68
Ｄ
Ｃ
Ｂ
Ａ
Ｃ
Ｄ
Ａ
Ｂ
78.5 78.5
78.5
78.5