Ulvac CRYO-U Series, Instruction Manual

Page: 78 / 106

Maintenance
8-10
ULVAC CRYOGENICS INCORPORATED
CAUTION
６．
Warm up the cryopump (refrigerator unit). Allow the 15K cryopanel of the cryopump (the
second stage) and the inside of the refrigerator to warm up to room temperature. It usually
takes hours for the inside of the refrigerator to warm up. The recommended time is for eight
hours or more.
When the cryopump is exposed to the atmosphere while warming up, the charcoal on the
15K cryopanel could adsorb large amount of moisture and it would bring about extension of
the regeneration time. Care must be taken to prevent this situation.
†
For Your Information
†
Performing the assisted warm-up procedures described in Section 6.3 of this manual can
shorten the warm-up time.
Before proceeding to next, make sure that the 15K cryopanel has reached room temperature.
７．
Connect the helium bottle and the regulator. Replace the air remained between the helium
bottle valve and the regulator with helium gas as instructed in Section 8.4 – Charging Helium
Gas.
Use helium gas with purity of 99.999
％
or more.
８．
Perform decontamination procedures as follows:
Before proceeding decontamination, prepare the rough pumping system as indicated in Figure
8-4. A roughing pump with the pumping speed of 20L/min or more and the ultimate pressure of
10Pa or less is recommended.
Figure 8-4 Cryopump Decontamination Procedure (1)
Charging Adopter
To Roughing Pump
High Purity Helium Bottle
Release helium gas
Charge helium gas
Charging Hose
Compressor Unit
Flexible Hose
Bottle Valve
Low Pressure
High Pressure
Regulator
Cryopump
0
0.5
1
1.
5
2
2.
5
3
3.
5
-0.
1
D-
P
RO
D-
P
RO
Ｖ２
Ｖ１
Ｖ３
ＲＥＴＵＲＮ
ＳＵＰＰＬＹ