Ulvac CRYO-U Series, Instruction Manual

Page: 77 / 106

CRYO-U
®
Cryopump Instruction Manual
ULVAC CRYOGENICS INCORPORATED 8-9
Figure 8-2 Disconnecting Flexible Hoses
５．
Reduce the pressure in the refrigerator unit and the flexible hoses to a level of 0.3MPaG by
opening the valve(V1) of the charging adaptor.
NOTE:
As refrigeration lowers the temperature of helium gas in the refrigerator unit, the density of
the gas increases. After shutdown of the refrigerator, the temperature of the helium gas in
the refrigerator returns to room temperature from cryostatic temperature gradually, and the
inner pressure rises at the same time. The unit has a pressure relief valve which opens at
the inner pressure of 1.9MpaG and more. If once the pressure relief valve opens, it could
cause a leakage that would depend on the surrounding environment such as dust.
Therefore, ensure to reduce the inner pressure right after shutdown of the refrigerator in
order not to work the pressure relief valve.
Figure 8-3 Connecting Charging Adopter
ＯＵＴ
ＩＮ
ＳＵＰＰＬＹ ＧＡＳ
ＣＯＬＤ ＨＥＡＤ ＰＯＷＥＲ
ＮＯ．１ ＮＯ．２ ＮＯ．３
ＩＮＰＵＴ ＰＯＷＥＲ
ＲＥＳＰＯＮＳＥ
ＲＥＭＯＴＥ
ＲＥＴＵＲＮ ＧＡＳ ＲＥＴＵＲＮ ＧＡＳ
ＷＡＴＥＲ ＩＮ
ＷＡＴＥＲ ＯＵＴ
ＲＥＴＵＲＮ
ＳＵＰＰＬＹ
Cryopump
Coldhead Cable
Disconnect here
Power Cable
Cooling Water Line
Flexible Hose
ＳＵＰＰＬＹ
ＲＥＴＵＲＮ
Ｖ３
Ｖ１
Ｖ２
D-P
RO
D-
P
RO
-
0.1
3.
5
3
2.5
2
1.5
1
0.
5
0
Cryopump
Charging Adopter
Flexible Hose
Coldhead Cable
Release He gas
Release He gas