Ulvac CRYO-U Series, Instruction Manual, Page: 28 / 106

Cryopump Description
1-2 ULVAC CRYOGENICS INCORPORATED
1.2 Specifications
Table 1-1 CRYO-U
®
Specifications
U6H U8H
U8HSP
U8H-U U8HL U10H U10HL U10PU
Pumping speed
（
L/s
）
Nitrogen
Hydrogen
Argon
Water
750
1,100
620
2,100
1,700
2,700
1,400
4,000
1,700
3,200
1,400
4,000
1,700
2,700
1,400
4,000
1,500
2,200
1,200
4,000
2,400
3,600
2,000
6,900
2,400
3,600
2,000
6,900
2,300
3,600
2,000
6,900
Ultimate pressure (Pa) The order of 10
-7
Maximum throughput
(Pa
･
L/s)
Argon
Hydrogen
1.1
×
10
3
1.1
×
10
2
1.2
×
10
3
2.4
×
10
2
1.2
×
10
3
2.4
×
10
2
1.2
×
10
3
2.4
×
10
2
1.2
×
10
3
1.6
×
10
2
1.3
×
10
3
1.5
×
10
2
1.3
×
10
3
1.5
×
10
2
8.0
×
10
2
1.5
×
10
2
Pumping capacity
(Pa
･
L) Argon
Hydrogen
5.6
×
10
7
3.1
×
10
5
1.0
×
10
8
1.0
×
10
6
2.5
×
10
8
1.0
×
10
6
1.0
×
10
8
1.0
×
10
6
1.6
×
10
8
1.2
×
10
6
1.0
×
10
8
1.2
×
10
6
1.0
×
10
8
1.2
×
10
6
1.0
×
10
8
6.7
×
10
5
Cool-down time (min)
(50/60Hz) (*1)
80/70 100/90 125/115 100/90 110/100 110/100 135/120 100/90
Weight (kg) (*2)
19 25 34 24 20 29 30 29
Refrigerator unit R10 / R10R / RM10 / R10RT / RM10T
Compressor unit C10 / C10T C15R / C15T
Compressor unit for
multiple connections(*3)
C30MVR / C30MVRT / C40R
Helium gas supply and
return connectors
1/2 self-sealing couplings
Mounting orientation Can be installed in any orientation (*4)
(*1) Shows the cool-down time when each cryopump is operated with the compressor C10 or C15R.
(*2) Shows the weight of standard cryopump. The weight varies depending on the model.
(*3) When making multiple cryopump configuration, one C30MVR/C30MVRT compressor unit can be
connected up to three units of U6H, U8H, U8HSP, U8H-U, or U8HL, and up to two units of U10H,
U10HL, or U10PU. With one C40R compressor unit, up to four units of U6H, U8H, U8HSP, U8H-U,
U8HL, and up to three units of U10H, U10HL or U10PU can be connected.
When in operation with multiple cryopump system, if one (or two) cryopumps are already cooled and
additional cryopump (or cryopumps) starts operation later, the cool-down time of the pump cooled later
may be longer than the value shown in the above table.
When cryopumps are used for sputtering system, some of the configurations with compressors in the
above table may not be appropriate. Contact us for the detail.
(*4) Mounting orientation may be limited depending on kinds or quantity of the gases to pump.