Ulvac CRYO-U Series, Instruction Manual, Page: 56 / 106

Operation
5-6 ULVAC CRYOGENICS INCORPORATED
WARNING
5.7 Shutdown Procedures
１．
Close the main valve
（
V1
）
.
２．
Turn off the compressor unit and the refrigerator to exhaust gases in the cryopump in accordance
with the regeneration procedures described in Section 6.
３．
It becomes at the normal temperature in the cryopump, the exhaust of gases is completed and the
cryopump will be in the state of a stop.
４． If you continue to conduct inspection, replacement, or repair of the cryopump, turn off the main
power supply and stop circulating the cooling water before beginning the work required.
Maintain your cryopumps so that they can be operated anytime.
◆
After stopping the cryopump operation, proceed with warm-up and rough pumping
which are parts of regeneration process in order to maintain the cryopump in a clean
vacuum.
Refer to Clause 3. Proceed with regeneration right after the cryopump stops in the
Safety section.
5.8 Handling of Hazardous Materials
◆
When pumping toxic gas, corrosive gas, combustible gas, or explosive gas, please be sure
to take sufficient safety measures based on respectively required statute(s) and rule(s), and
put it into effect under the user's responsibility.
In addition, be careful not to exceed atmospheric pressure with those gases during
regeneration.
Please refer to Safety Instructions for these hazardous gases.
◆
When transporting cryopumps which have pumped hazardous materials, take appropriate
measures following applicable laws or regulations.
CAUTION