Ulvac CRYO-U Series, Instruction Manual

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CRYO-U ® Cryopump Instruction Manual
MA06001E,2012JE02 ULVAC CRYOGENICS INCORPORATED 6-1
6. REGENERATION
6.1 The General ···························································· 6-1
6.2 Regeneration Time ···················································· 6-2
6.3 Warm-up Method ······················································ 6-2
6.4 Regeneration Flow Chart ············································ 6-4
6.1 The General
Regeneration is a process to make the cryopump recover to its early state of the pumping
performance by releasing the condensed or absorbed gases out of the pump.
Regeneration consists of four operations such as warm-up, discharge (desorption) of the
captured gas, pressure buildup check, and cool-down.
◆
After stopping the cryopump operation, proceed with warm-up and rough pumping which
are parts of regeneration process in order to maintain the cryopump in a clean vacuum.
Refer to Clause 3. Proceed with regeneration right after the cryopump stops in the Safety
section.
◆
Do not block the pressure relief valve.
◆
Be careful of a burn when using a baking heater.
◆
In case of regeneration after pumping flammable, explosive, or combustion enhancing gas,
both the purge of the cryopump and the dilution of the exhaust duct with the inert gas are
required in order to reduce the hazardous gas within the concentration where it does not
burn or explode even if it evaporates during warm-up.
Refer to Paragraph 6.Regeneration after pumping flammable, explosive, or combustion
enhancing gas in the Safety section.
◆
Regarding toxic, corrosive, or other dangerous gases, be sure to process them safely so
as not to harm the human body etc. Refer to Section 5.8 Handling of Hazardous
Materials for the details.
CAUTION
WARNING