MZ0F001E,2013OR03
ULVAC CRYOGENICS INCORPORATED
F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems
,
please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump
/
Super trap Model
:
Cryopump
/
Super trap Serial No.
:
Refrigerator Model
:
Refrigerator Serial No.
:
Compressor Model
:
Compressor Serial No.
:
Temperature controller
/
Thermal display Model
:
Temperature controller
/
Thermal display
Serial No.
:
Option Part Model
:
Optional Part Serial No.
:
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5
.
In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or
Summary of Contents for CRYO-U Series
Page 2: ......
Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 24: ...This page intentionally left blank S 12 ULVAC CRYOGENICS INCORPORATED...
Page 26: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 36: ...Cryopump Description 1 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 50: ...Installation 4 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 64: ...Regeneration 6 8 ULVAC CRYOGENICS INCORPORATED This page intentioanlly left blank...
Page 68: ...Disconnection and Storage 7 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 82: ...Maintenance 8 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 90: ...Troubleshooting A 8 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 92: ...Flexible Hose B 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
Page 104: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...