Ulvac CRYO-U Series, Instruction Manual

Page: 71 / 106

CRYO-U
®
Cryopump Instruction Manual
8.2 Consumables
O-rings and gaskets listed below are consumable parts for cryopumps. Replace them with new
ones if necessary.
Table 8-2 CRYO-U®6H Consumables ( ):type
Mounting flange
Parts
UVG-150 UFC203 , ICF203
Mounting flange
O-ring
(V175)
Gasket
(UFC203G)
Accessory flange
（
C-type
）
O-ring (AS568-020)
Accessory flange
（
UFC034
）
Gasket (UFC034G)
Refrigerator flange O-ring (V100),Metal O-ring
Pressure relief valve O-ring (N5)
Mounting flange
Table 8-3 CRYO-U® 8H, U8HSP, U8H-U, U8HL Consumables
Parts
UVG-200 6B ANSI UFC253,ICF253
Mounting flange
O-ring
(V225)
O-ring
(AS568-172)
Gasket
(UFC253G)
Accessory flange （ C-type ）
O-ring (AS568-020)
Accessory flange
（
UFC034
）
Gasket (UFC034G)
Refrigerator flange O-ring (V100),Metal O-ring
Pressure relief valve O-ring (N5)
Roughing port (U®8HL only)
O-ring (NW25)
Table 8-4 CRYO-U®10PU,U10H,U10HL Consumables
Mounting flange
Parts
UVG-250 UFC306 ICF305
Mounting flange
O-ring
(V275)
Gasket
（ UFC306G ）
Gasket
(ICF305G)
Accessory flange （ C-type ）
O-ring (AS568-020)
Accessory flange(UFC070) Gasket (UFC070G)
Refrigerator flange O-ring (V100),Metal O-ring
Pressure relief valve O-ring (N5)
Notes: 1) Material of O-ring: Recommend Viton.
2) Type N of O-ring is based on the standard enacted by ULVAC Inc.
Other types of O-ring are based on JIS or ANSI standard.
3) Regarding a metal O-ring, select what suits flange size.
ULVAC CRYOGENICS INCORPORATED 8-3