Ulvac CRYO-U Series, Instruction Manual, Page: 67 / 106

CRYO-U
®
Cryopump Instruction Manual
2. Before removing the cryopump from the vacuum chamber, make sure that the
cryopump has reached room temperature after regeneration.
3. Put the protective cover on the mounting flange of the cryopump. Put the
protective cap on the helium gas connector of the refrigerator.
4. Cover the entire body of the cryopump with vinyl sheet like the state when being
delivered.
5. Fix the traveling base to the floor not to move around.
6. Cryopumps should be kept away from direct sun light, high temperature, humidity,
dust, vibration, radiation, wind and rain.
◆
Shipment of the cryopump
Put all covers and caps as it was delivered and avoid excessive shock.
◆
Connect the refrigerator cable and operate the cryopump about 10 minutes biannually.
This work is effective in maintaining the grease lubrication of the bearings used in the
refrigerator.
When the cryopump has been placed without operating for one year or more, perform
cryopump decontamination before resumption of operation.
ULVAC CRYOGENICS INCORPORATED 7-3