Ulvac CRYO-U Series, Instruction Manual, Page: 105 / 106

CRYO-U ® Cryopump Instruction Manual
Revision History
Date Revision No. Contents
2005-12-21
2006-02-02
2006-02-20
2006-11-16
2007-05-24
2010-01-18
2010-09-08
2010-11-02
2011-10-21
2012-05-31
2005.12
2006FY01
2006FY02
2006NR03
2007MY04
2010JA05
2010SR06
2010NR07
2011OR08
2012MY09
First edition
The recommended torque value for the connection of
flexible hoses has been changed to 20N
･
m.
P.8-2, The remarks for cold head maintenance were added in
Table 8-1.
The model name for accessory flange has been changed.
Added an item to be maintained.
Full-fledged revision.
P.8. Item names and item codes of equipments for
maintenance
have been changed.
Cover: Export control policy has been revised.
Figure 1-3 Major Components
The figure for CRYO-U®8HL, U10HL has been revised.
Section 5.3 Pressure Buildup Test has been revised.
“
SERVICE NETWORK” has been revised.
“
Safety Instructions” P. S-7 1.Safety measures for
regeneration
①
The description of inert gas has been added
to the section
①
.
P.1-2 Table 1-1 CRYO-U® Specifications
The specifications of U10H and U10HL have been revised.
P.1-4
◆
Dimensions
The basic dimensions of U6H, U8HL, U10H, and U10PU
have been revised.
P.4-5 Section 4.4 “Connecting Purge Gas Line”
P.6-2
“◇
Unassisted warm-up
”
CAUTION section
P.6-3
“◇
Assisted warm-up using inert gas
”
The descriptions of inert gas have been changed in the three
sections listed above.
P.4-5 Section 4.4 “Connecting Purge Line”
The supply pressure has been changed from “5kPaG or less”
to “10kPaG or less”.
The description of Regeneration Gas Purge PR Unit has been
ULVAC CRYOGENICS INCORPORATED R-1