Inficon ULTRATEST UL3000 Fab, Translation Of The Original Operating Instructions

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6 | Operation INFICON
64 / 140 UL3000-Fab-Operating-instructions-iina73en1-08-(1910)
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The chamber is evacuated 3 times and vented.
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After cleansing, the current helium background is measured.
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The new values of the measured background are automatically stored and
subtracted from the results of future measurements.
See also
2
Result display of the Auto Leak Test [
}
55]
6.3.6 HYDRO•S (only UL3000 Fab PLUS)
If you are testing large test objects during vacuum operation, you can reduce the time
to ready for measurement by using HYDRO•S, see also Operation mode "Vacuum".
6.3.6.1 Set HYDRO•S (UL3000 Fab PLUS)
In addition to the basic setting described here, the availability of HYDRO•S depends
on additional requirements, such as the selected operation mode and the operating
state, see “Use HYDRO•S (UL3000 Fab PLUS) [ } 64]”.
ü Supervisor - rights
1 > Setup > Measurement > HYDRO•S
2 Make a selection from:
"Deactivated" (factory setting) if you do not use HYDRO•S and also want to
dispense with manual switchability.
"Manual" if you want to activate or deactivate HYDRO•S by pressing on the
measurement screen. See also "Assembly of the touchscreen [
}
25]".
"Automatic" if you want to use HYDRO•S as much as possible.
3 Save .
4
After setting HYDRO•S to “Manual” or “Automatic” perform a calibration, see
“Calibrating [
}
72]”.
6.3.6.2 Use HYDRO•S (UL3000 Fab PLUS)
HYDRO•S manual
ü
HYDRO•S is set to “Manual”, see “Set HYDRO•S (UL3000 Fab PLUS) [
}
64]”.
ü
Gas type helium (mass 4) is selected, see Select gas [
}
62].
ü
Operation mode “Vacuum” is active.
ü
Vacuum range ULTRA is reached.
ü
Device is in the "Measuring" state.
ü
The current leak rate is larger than 3x10
-10
mbar l/s.