Inficon ULTRATEST UL3000 Fab Translation Of The Original Operating Instructions Download Page 85

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INFICON

Operation | 6

UL3000-Fab-Operating-instructions-iina73en1-08-(1910)

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V10

V4c

V4b

V4a

V2b

V2a

Fig. 13: The most important components of the vacuum diagram in UL3000 Fab devices

1 Mass spectrometer

6 Sniffer line

2 Internal calibration leak

7 Pressure measuring point for flow

monitoring

3 Inlet flange

8 Fore pump

4 Inlet pressure gauge

9 Fore-vacuum pressure gauge

5 V1 … V10: Solenoid valves

for controlling gas flows

10 Turbo molecular pump

6.12 Resetting to factory settings

You can restore the device to factory settings.

Loss of settings and measurement data

After resetting to factory settings only the manufacturer factory settings are in the

memory of the device. The software of the device is not reset when restoring the

factory settings.

Supervisor - rights

> Setup > General > Reset

Make your choice:

If you want to reset all settings, press the "Reset settings" button.

If you want to delete all recorded measurement data and user accounts,

press the "Delete data" button.

Summary of Contents for ULTRATEST UL3000 Fab

Page 1: ...ranslation of the original operating instructions UL3000 Fab UL3000 Fab PLUS Helium Leak Detector with ULTRATEST Sensor Technology iina73en1 08 1910 Catalog No 550 200 550 250 From software version 1 41 ...

Page 2: ...INFICON GmbH Bonner Strasse 498 50968 Cologne Germany ...

Page 3: ...odes 16 4 2 1 Operation mode Vacuum 16 4 2 2 Operation mode Sniffing 16 4 2 3 Operation mode Auto Leak Test 18 4 3 Device setup 18 4 3 1 Overall device 18 4 3 2 Control unit 21 4 3 2 1 START button 22 4 3 2 2 STOP button 22 4 3 2 3 ZERO button 23 4 3 2 4 Meaning of the button LEDs 24 4 3 2 5 Meaning of the status LED 24 4 3 2 6 Assembly of the touchscreen 25 4 3 3 Vacuum connections 27 4 3 3 1 Inl...

Page 4: ... Modify Personal Settings 49 6 2 4 Switch off Automatic Login 50 6 2 5 Switch on Automatic Login 50 6 2 6 Presentation of the measurement screen 50 6 2 6 1 Changing the presentation of the line graph 51 6 2 6 2 Changing the presentation of the bar graph 52 6 2 6 3 Changing the presentation of the circle graph 53 6 2 6 4 Change general display settings 53 6 2 7 Result display of the Auto Leak Test ...

Page 5: ... the inlet area 71 6 3 14 Change SL3000 settings for sound light UL3000 Fab PLUS only 71 6 3 15 Change the sniffer line pressure monitoring 71 6 3 16 Calibrating 72 6 3 16 1 Internal calibration 72 6 3 16 2 External calibration 72 6 3 16 3 Check calibration 73 6 3 16 4 Measure internal calibration leak 73 6 4 Measuring 74 6 5 Measuring helium ambient concentration UL3000 Fab PLUS only 75 6 6 Measu...

Page 6: ...0 Updating the software 83 6 10 1 Update the user interface software 83 6 10 2 Updating the software of the basic unit 83 6 10 3 Update the software in expert mode 84 6 11 View vacuum diagram 84 6 12 Resetting to factory settings 85 6 13 Logging off from the device 86 6 14 Switching off the device 86 7 Warning and error messages 87 7 1 List of warning and error messages 87 8 Cleaning and maintenan...

Page 7: ...and the bus module 122 10 3 2 Setting a bus module address 122 10 4 Network 123 10 4 1 Operate leak detector via web browser LAN 123 10 4 1 1 Configure the LAN connection of the leak detector 123 10 4 1 2 Setting the LAN connection in the PC or Tablet 124 10 4 1 3 Allow client access 124 10 4 2 Operate leak detector via web browser wireless LAN 125 10 4 2 1 Configure the wireless LAN connection of...

Page 8: ...d at technically qualified specialists with experience in the field of leak testing technology 1 2 Warnings DANGER Imminent hazard resulting in death or serious injuries WARNING Hazardous situation resulting in potential death or serious injuries CAUTION Hazardous situation resulting in minor injuries NOTICE Hazardous situation resulting in damage to property or the environment 1 3 Definition of t...

Page 9: ...sure FINE FINE denotes the connection to the turbo molecular pump for inlet pressures up to 0 4 mbar This is also used for the Sniffing operation mode Forming gas Forming gas is a collective term for gas mixtures of nitrogen and hydrogen GROSS GROSS donates the connection to the turbo molecular pump with the lowest sensitivity This allows high inlet pressures up to 15 mbar Internal helium backgrou...

Page 10: ...adjusted tracer gas is already in the volume on the surfaces of the test chamber supply lines and even in the leak detector itself This certain amount of tracer gas generates a measurement signal which is called the Background signal The ongoing evacuation of the test chamber continuously reduces this background signal Operation mode Sniffing Ambient air is continuously fed into the leak detector ...

Page 11: ...loads or vibrations Pumping hydrogen concentrations which can explode in combination with oxygen The allowable composition of venal gas mixtures can be read in the safety data sheets of the respective manufacturers Using the device in potentially explosive atmospheres Inspecting electrically live conductors or objects with a sniffer line Sudden venting of vacuum systems Use of the device as a tran...

Page 12: ...uction manual available on site Personnel qualifications Only instructed personnel should be permitted to work with and on the device The instructed personnel must have received training on the device Make sure that authorized personnel have read and understood the operating instructions and all other applicable documents 2 3 Duties of the operator Read observe and follow the information in this m...

Page 13: ... Use only tracer gases with a concentration of hydrogen that cannot explode in combination with oxygen The allowable composition of venal gas mixtures can be read in the safety data sheets of the respective manufacturers Danger from suction effect at the inlet flange When operating the device in operation mode Vacuum there will be a negative pressure created at the inlet flange The suction effect ...

Page 14: ...on in turbo pump 1 Wrench T25 Torx UL3000 Fab PLUS only 1 Bracket 5 for corrugated tube UL3000 Fab PLUS only 1 Edge protection for holder UL3000 Fab PLUS only 1 Self tapping screws UL3000 Fab PLUS only 2 In addition 2 keys to open the jim crow under the handle Check the delivery contents after receiving the product to ensure it is complete Explanations 1 For winding the power cord or the sniffer l...

Page 15: ... grab from both sides with four persons under the countertop or under the floor plate To avoid bruises do not touch the moving rollers for lifting Alternatively slide a forklift under the side of the device and move the device gently CAUTION Danger of bruising extremities Feet can be rolled over and crushed Keep feet away from the rollers Do not pull the device Hold the device by the provided hand...

Page 16: ... external calibration leak must be mounted on inlet flange See also External calibration 72 To be able to perform leak detection using the vacuum method the inlet flange must be connected to the desired test object If the pressure in the specimen is less than the surrounding pressure then helium which is sprayed over the specimen can penetrate into the specimen if there is a leak Helium can be det...

Page 17: ... signals 29 Via this connector both the electrical connection and the connection of the vacuum system is made As no connection is made to the inlet flange on the upper side of the device then no vacuum components that are already connected to the inlet flange need to be removed when changing to the operation mode Sniff Comparison SL200 SL3000 Detection limit 5 x 10 8 mbar l s 2 x 10 7 mbar l s Gas...

Page 18: ...t chamber TC1000 is used the test starts automatically when the cover is closed Results are achieved within a very short time The internal calibration leak of the leak detector is used to dynamically calibrate the desired test cycle Leak rates in the range of 10 9 mbar can be detected within 5 seconds See also 2 Set Auto Leak Test 63 2 Result display of the Auto Leak Test 55 4 3 Device setup 4 3 1...

Page 19: ...INFICON Description 4 UL3000 Fab Operating instructions iina73en1 08 1910 19 140 Fig 2 Front view with open flap The remote control RC1000 shown here can be obtained as an option ...

Page 20: ...4 Description INFICON 20 140 UL3000 Fab Operating instructions iina73en1 08 1910 Fig 3 Back view The picture shows standard accessories and optional accessories ...

Page 21: ... buttons START STOP and ZERO background suppression on the housing See also Assembly of the touchscreen 25 see also START button 22 The LED lighting of the buttons on the control panel changes its display color according to the device state see also Meaning of the button LEDs 24 The control unit can be rotated USB 2 0 Interface USB 2 0 Interface Ethernet network interface Fig 5 Control unit rear v...

Page 22: ...rate leak detector via web browser wireless LAN 125 4 3 2 1 START button To start the measurements Can be operated via the touchscreen of the control panel If you press the START button again during measurement the maximum leak rate Qmax that has occurred since START is displayed See also Assembly of the touchscreen 25 If you press the START button on the control panel during measurement the maxim...

Page 23: ... panel Background suppression ON ZERO button Background suppression OFF Press the ZERO button again and keep it pressed for approx 2 seconds The actual measured leak rate is considered to be a background signal Depending on the selected variant of operation mode the background signal is hidden until the display limit of the respective vacuum range is reached Display limits according to factory set...

Page 24: ... acknowledged Off Red Error ZERO button LED Off No measurement operation Off ZERO blocked Blue ZERO off and HYDRO S off Green ZERO ON Yellow ZERO off and HYDRO S on 4 3 2 5 Meaning of the status LED The status LED is located on the back of the instrument inside of the connector block for the equipment and control signals see also Connections for accessories and control signals 29 Status LED Meanin...

Page 25: ...ols and elements Operation Next page Previous page User name access control Settings Diagnosis Measuring mode Operation mode Gas Information Navigation button Navigation button Navigation button Navigation button Setpoints Measurement value Supervisor ULTRA Vacuum Volume Calibrating Circle graph ZERO ZERO On Off Measurement data recording Switching Line graph Bar graph HYDRO S leak rate Measuremen...

Page 26: ...different colors Gray Function is disabled Light blue Function can be activated White Function is active General function symbols Cancel ongoing function Call up help for the current function Confirm entry or selection Load Save Edit Copy Delete WLAN LAN Next page Previous page Table 2 Function buttons Other symbols Authorization User Authorization Operator Authorization Supervisor View the time o...

Page 27: ...down times are extended Use this inlet also for the connection of the SL200 sniffer line or the test chamber TC1000 See also 2 Shipment Transport Storage 14 4 3 3 2 Exhaust WARNING Hazardous gases Depending on the connected container and the gas contained therein harmful gases can get into the ambient air via the exhaust filter of the leak detector Make sure you have protection measure to prevent ...

Page 28: ... connect a gas supply line this means Nitrogen or fresh air or similar over the purge gas connection The pressure in this gas line must not exceed the atmospheric pressure by more than 100 mbar 4 3 3 4 Venting connection Normally the specimens are vented with ambient air after completion of the test If necessary the test specimens can be ventilated with another gas e g fresh air dry air nitrogen e...

Page 29: ...ble or direct connection of the radio transmitter via an adapter The remote control is not part of the scope of delivery of the device SERVICE Connection only to be used by the Service Connection for mains cable To the power supply of the UL3000 Fab UL3000 Fab Plus Venting connection For hoses with an outside diameter of 14 mm see also Venting connection 28 Purge gas connection For hoses with an o...

Page 30: ...b PLUS Operating voltage 100 240 V 10 50 60 Hz Max power consumption 1500 VA Typical power consumption when pumping in measuring mode 1200 VA 700 VA Main fuse Circuit Breaker TA45 20A thermal fuse Ingress protection IP20 Excess voltage category II Electronic interfaces USB Ethernet SNIFFER ACCESSORIES LD REMOTE CONTROL SERVICE Physical data UL3000 Fab UL3000 Fab PLUS Minimum detectable leak rate v...

Page 31: ...n measurement declaration was drawn up in accordance with the harmonized standard DIN EN ISO 3744 2011 Ambient conditions UL3000 Fab UL3000 Fab PLUS Max altitude above sea level 2000 m Maximum relative humidity 80 at 30 C linear decreasing to 50 at 40 C Storage temperature 0 C to 50 C Operating temperature 10 C to 40 C Pollution degree 2 4 5 Factory settings Leak rate setpoint 1 1 x10 9 mbar l s L...

Page 32: ...gital output pin 7 IO1000 Ready for operation Digital output pin 8 IO1000 Calibration active Digital input pin 1 IO1000 VENT Digital input pin 2 IO1000 Sniff Digital input pin 3 IO1000 Start Digital input pin 4 IO1000 Stop Digital input pin 5 IO1000 ZERO Digital input pin 6 IO1000 CAL Digital input pin 7 IO1000 Clear Digital input pin 8 IO1000 Purge Digital input pin 9 IO1000 Start Stop Digital in...

Page 33: ...e monitoring SL3000 min 80 mbar Pressure monitoring SL3000 max 200 mbar Pressure limit MASSIVE GROSS 15 0 mbar Pressure limit GROSS FINE 2 0 mbar Pressure limit FINE ULTRA 0 3 mbar Max evacuation time gross leak 600 s Max evacuation time measurement 1800 s Gross leak protection leak rate limit 1 x10 3 mbar l s Gross leak protection Off Particle protection Off Background suppression internal only V...

Page 34: ...er 1000 h Air filter 2500 h Set user Name Supervisor PIN 1111 Language English Auto Leak Test Min test time 5 s Max test time 10 s Part numbering ON Part number 1 Warning limit for consecutive failed tests 5 Diagram type Line graph Line graph Scaling Logarithmic Decades 4 Autoscale On Lower diagram limit 1 10 12 Time axis 30 s Bar graph Scaling Logarithmic Decades 4 Autoscale On Lower diagram limi...

Page 35: ...INFICON Description 4 UL3000 Fab Operating instructions iina73en1 08 1910 35 140 Export format CSV en Enabled Off Export metadata On WLAN Name SSID UL3xxx Network key INFICONUL Enable On LAN Method Off ...

Page 36: ... the exhaust connection when using gases which cause a health risk WARNING Danger from moisture and electricity Moisture entering the device can lead to personal injury due to electric shocks as well as damage to property due to short circuiting Only operate the device in dry environments and only in buildings Operate the device away from sources of liquid and moisture Position the device so that ...

Page 37: ...an obliquely hanging power cable untwist the cable completely or use the power line strain relief to guide the mains cable on the device directly to ground level See also Connect the supplied accessories 39 NOTICE Material damage from overheated device The device heats up during operation and can overheat without sufficient ventilation Please note the technical data Ensure sufficient ventilation e...

Page 38: ...er not to jeopardize the security of your company network never connect the leak detector directly to the public Internet This is true for connections over WLAN as well as over Ethernet However if you want to access the web interface of the leak detector remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connecti...

Page 39: ...nt Hook 4 screw M6 x 12 4 lock washer S6 4 Required tools supplied Wrench T30 Torx In order to be able to fix the mains cable and if necessary a sniffer line on the device mount the hooks on the device as shown If there is a bottle holder attached to the device mount the hooks on the bottle holder and secure the screws with the delivered nuts 1 3 2 1 Hook 2 Screw M6 x 12 3 Guard washer S6 ...

Page 40: ...mount Strain relief screw M6 x 12 lock washer S6 1 1 1 Required tools supplied Wrench T30 Torx To avoid the risk of tripping mount the strain relief power supply at the device Thus the power supply is lead from the device to the ground If there is a bottle holder attached to the device mount the power line strain relief on the bottle holder and secure the screw with a delivered nut ...

Page 41: ...INFICON Installation 5 UL3000 Fab Operating instructions iina73en1 08 1910 41 140 1 3 2 1 Screw M6 x 12 2 Guard washer S6 3 Strain relief ...

Page 42: ...older complete 1 screws M6 x 12 3 lock washer S6 3 self tapping screws 2 edge protection made of PVC profile 1 tools supplied Wrench T25 and T30 Torx For fixing a corrugated hose between the inlet flange of the device and the test chamber or test object respectively 1 2 1 1 1 3 2 4 1 Holder complete 3 Self tapping screws 2 Screw M6 x 12 lock washer S6 4 Edge protection ...

Page 43: ...se adapter on the device To discharge gases through a DN25 exhaust hose mount the KF flange DN25 exhaust hose adapter supplied in the exhaust port on the rear of the device Tighten the adapter clockwise If you have an exhaust hose with a hose nozzle G inch male thread you can alternatively fix this hose nozzle in the exhaust port by turning it clockwise ...

Page 44: ...avoid injury from the sniffer tip align the sniffer tip in the bracket so that it points away from the operator A bracket is available for the sniffer tip The bracket can be mounted on the back of the device see also Overall device 18 Scope of delivery amount Bracket 1 M6 x 12 mm screws 2 S6 x 10 x 0 7 mm washers 2 1 Mount the bracket as shown using the two screws and washers on the back of the de...

Page 45: ...g turbo molecular pump Avoid any jerking movements or vibrations to the device during operation and for up to 2 minutes after switching off Do not switch on the device when the ambient temperature is less than 10 C ü A DN 25 KF blank flange is available if not already installed on the inlet flange ü A helium calibration leak is available optional 1 Unpack the device take a look at the supply and i...

Page 46: ...al calibration wait for getting a better quality of measurement results 15 to 20 minutes until the device has warmed up 10 To call the calibration menu press on the cross hair icon 11 Select Internal 12 Press the button ð The automatic internal calibration starts and requires approx 30 seconds 13 If you want to check the measurement accuracy of the device using the optional helium calibration leak...

Page 47: ... run up Fig 9 Window Standby Starting the measurement Calibrating Purge Vent 6 2 Basic settings You are able to save the actual settings of the device at any time so that you can use them at a later time see also Loading saving parameters 6 2 1 Set language on the user interface You can set the language in the user settings see Select modify create user profile 48 6 2 2 Setting date time and time ...

Page 48: ... Moreover they can Create modify delete user Cxport delete measurement data Modify measurement settings Supervisor Members of the group Supervisor have all the rights of groups User and Operator Moreover they can create modify delete operators create modify delete supervisors Perform software updates modify date time 6 2 3 2 Select modify create user profile ü Operator or Supervisor rights 1 User ...

Page 49: ... change the content enter a 4 digit PIN 5 To assign the required rights to the user select a group Via and select between the groups User Operator and Supervisor See Overview of Rights Groups 48 6 In the field Language assign a language to the user via and 7 Save 6 2 3 3 Modify Personal Settings As a user with limited rights User you can also modify your language or PIN By this the associated user...

Page 50: ...login which have been already registered in the device see Select modify create user profile 48 ü Supervisor rights 1 User accounts Manage Auto Login 2 In the Manage Automatic Login window deactivate the option Active 3 Save ð After restarting the device the current settings are applied 6 2 5 Switch on Automatic Login You can specify if a user of your choice is automatically logged in after the de...

Page 51: ...Changing the presentation of the bar graph 52 Changing the presentation of the circle graph 53 See also 2 Changing the presentation of the line graph 51 2 Changing the presentation of the bar graph 52 2 Changing the presentation of the circle graph 53 6 2 6 1 Changing the presentation of the line graph Supervisor ULTRA Fig 10 Presentation of the line graph ü Operator or Supervisor rights 1 Display...

Page 52: ...decade 7 Save 6 2 6 2 Changing the presentation of the bar graph Fig 11 Presentation as bar graph ü Operator or Supervisor rights 1 Display Bar graph 2 In the field Scaling select between Linear and Logarithmic 3 Select between the different viewable Decades 4 To dynamically adjust the upper and lower limit on the leak rate activate the option Autoscale 5 If the option Autoscale is not active sele...

Page 53: ...omatic scaling via the option Autoscale 4 In the Lower diagram limit field select the desired lower limit for the pie chart This limit is also effective if the Autoscale option is activated 5 Save 6 2 6 4 Change general display settings ü Operator or Supervisor rights 1 Display General 2 If very small leak rates are of no interest to your application and you want to raise the lower leak rate limit...

Page 54: ...from the remaining gas which has not yet been pumped out Very clean systems show a background in the range of 1 x 10 11 mbar l s Under normal conditions there is a background of 1 x 10 10 mbar l s or 1x10 9 mbar l s For the mathematical treatment of the internal background see Change background suppression 69 4 Save ...

Page 55: ... passed test the defect count is reset to 0 see Set Auto Leak Test 63 5 Auto Leak Test pause When the test chamber is closed you can interrupt the measurements by pressing this button and confirming in the following window The test chamber remains in the pumped down state 6 Measurement result 7 Operation mode Auto Leak Test active see Select operation mode 61 6 2 8 Change units For the vacuum oper...

Page 56: ...earing due to loud audio The alarm level of the device can exceed 85 dB A Set a volume up to a maximum of 5 Use suitable hearing protection at set volumes above 5 ü Operator or Supervisor rights 1 Audio 2 In order to change the volume of the audio alarm and the notification sounds select the desired Volume Do not fall below the set value for the Minimum volume in the next field ð Setting range 0 1...

Page 57: ...ing is only for the audible alarm type SETPOINT and TRIGGER 6 If you wish to have notification beeps activate the option Notification beep 7 Save 6 2 10 Change the protection settings You can protect the device from Helium contamination with gross leaks and from the penetration of particles Furthermore you can change the maximum evacuation time ü Supervisor rights 1 Setup Measurement Protection 2 ...

Page 58: ...ct and from the effective pumping speed If the pump down process should not be aborted enter 0 This corresponds to the entry infinitely 5 Note The following setting does not apply if the vacuum range Massive is switched on See also Activate vacuum ranges 62 To change the maximum evacuation time before the measurement enter the desired time in seconds under Max evacuation time until measurement The...

Page 59: ...ime until the next maintenance is displayed ü Supervisor rights 1 Setup Maintenance requests ð In the Enable disable maintenance requests window you can activate or deactivate the maintenance requests for the following modules Calibration leak TMP Filter sniffer tip backing pump Exhaust filter Air filter 2 Set up 3 Save 6 2 13 Activating or deactivating calibration requests If the option calibrati...

Page 60: ...ng which enables the operation via buttons on the control panel and via the remote control ü Operator or Supervisor rights 1 Setup Measurement Miscellaneous 2 Under Local control you make your choice in the selection field between ð Released The buttons START STOP and ZERO on the control panel and also the buttons of the remote control are released The operation via touchscreen can be disabled how...

Page 61: ...our selection with ð Alternatively you can press in the Favorites window mark an empty entry and select the desired menu name from the list overview using the shown Change Favorites 1 In the Favorites window press ð This opens the Manage window in which you can tap the desired entry ð The icon is displayed 2 After pressing this icon the list overview is displayed with the menu names from which you...

Page 62: ... separately When the setpoints are exceeded If the setpoint 1 or 2 is exceeded the measurement line in the measurement window changes color The setpoint relay of the digital output switches see also I O module 117 or the interface description Also setpoint 1 defines the trigger point for the different alarms see also Change audio settings 56 It is also the limit for I ZERO see Set and use the func...

Page 63: ... threshold value can alternatively be set in the window Setpoint values see Setting setpoints 62 Part numbering After activating this function a number is assigned for each test This facilitates the traceability of test results see Call result log 81 Part number To assign a part number For each measurement this partial number is counted as starting number Warning limit for consecutive failed tests...

Page 64: ...quirements such as the selected operation mode and the operating state see Use HYDRO S UL3000 Fab PLUS 64 ü Supervisor rights 1 Setup Measurement HYDRO S 2 Make a selection from Deactivated factory setting if you do not use HYDRO S and also want to dispense with manual switchability Manual if you want to activate or deactivate HYDRO S by pressing on the measurement screen See also Assembly of the ...

Page 65: ...factor If you are measuring in the operation mode Vacuum and using an external pump in parallel the measured leak rate would be too small in comparison to the leak rate based on an internal calibration If you would like to compensate for this you can multiply the measured leak rate with the suitable machine factor and then have the value shown This factor is used only in the vacuum mode and not in...

Page 66: ...g points between the vacuum ranges MASSIVE GROSS FINE and ULTRA can be changed This can be necessary if the device is pumped down with gases other than air such as Argon The reason for this is the gas type dependence of the internal Pirani pressure gauges By changing the preset switching point this can be compensated for The pressure signal of the gas type dependent inlet pressure indicator Pirani...

Page 67: ...e same time Activate or deactivate ZERO ZERO is activated by factory settings ü Supervisor rights 1 Setup Measurement ZERO and filter 2 If necessary change ZERO mode The factory setting is I ZERO 2 0 ð If you select OFF the ZERO button does not work 3 Save ð If ZERO is activated start the function by pressing the ZERO button See also ZERO button 23 How do I switch the ZERO function ON Briefly pres...

Page 68: ...tween Immediate No ventilation and Manual If Immediate is activated the ventilation is triggered when changing to Standby If manually is activated the ventilation is activated after a longer press on the button STOP or by pressing at in the window Standby See also Switching on 47 ü Operator or Supervisor rights 1 Setup Measurement Vacuum Vent 2 Set up 3 Save Purge By activating the flushing functi...

Page 69: ...nge leak rate filter The leak rate filter I CAL is preset I CAL ensures that the averaging time is optimally adapted to the leak rate range The abbreviation I CAL stands for Intelligent Calculation Algorithm for leak rates This ensures that the signals are averaged at optimal time intervals and this is based on each leak rate range I CAL also determines interference spikes which bear no relevance ...

Page 70: ...is time If you want to make sure that a current internal ground is used in the following measuring operation do not press START until the background display in standby has changed from low opacity grayed out to normal opacity To make the background display visible in standby mode activate the corresponding function see Change general display settings 53 ð Inlet area Additionally to the deduction o...

Page 71: ...chscreen concerning the measurements The settings take effect with Setpoint 1 ü Operator or Supervisor rights 1 Setup Measurement Sniff SL3000 sniffer line 2 Select Sniffer line light alarm configuration ð As choices there are Lighter Off or Flash 3 Select Sniffer line light brightness ð You have a choice of OFF 1 6 4 Switch on the Sniffer line beep sniffer audio ð As choices there are Off or Beep...

Page 72: ... is some doubt as to the measurement ability of the device When using hydrogen or helium 3 3 He as tracer gas an internal calibration is not possible In this case use an external calibration leak The operation modes Vacuum and Sniffing must be separately calibrated when using an external calibration A calibration should only take place when the device is at operating temperature Calibrate at least...

Page 73: ...con 2 Select Proof ð The check is started and the calibration factor is recalculated ð The newly calculated calibration factor is displayed ð If the newly calculated calibration factor deviates considerably from the stored calibration factor a prompt for new calibration is displayed 6 3 16 4 Measure internal calibration leak ü User rights ü The device is in Standby or Measure mode 1 Select the cro...

Page 74: ...he current measurement are carried out See Basic settings 47 and Settings for the measurements 61 4 When performing a calibration note the 20 minute warm up time See Calibrating 72 5 In standby mode initiate the measurement process by pressing the START button ð If you want to ensure that a current internal background is used in the following measuring operation please observe the notes in chapter...

Page 75: ... is in the Standby state 1 Select the cross hair icon 2 Select I CHECK 3 Press 4 View the measurement result 6 6 Measurement data You can record measured values in the internal database Recording can be done automatically during the measurement or via the Record measurement data button in the measurement screen See also Switch on data recording and configure export 75 You can also export the displ...

Page 76: ...ta option ð Note If other data is exported in addition to measurement data this can increase the effort required for data post processing 5 Save 6 6 2 Display measurement cycles The measuring cycle is the time between pressing the START button and the STOP button You can view the associated information and optionally edit 2 free text fields 1 Measurement data Measurement cycles ð Stored measuremen...

Page 77: ...load ð Alternatively enter your request with the desired parameters as URL in your browser With this procedure you not only set the desired time period a block of maximum 24 hours but you can also select the file format and data scope with or without metadata Example 1 http 192 168 11 124 3000 md f csv_en c 4 d mr Returns measured values and metadata of the measurement cycle with ID 4 in the forma...

Page 78: ...B If storage is needed for the recording and the maximum database size in measurement values has been exceeded the oldest records are automatically deleted so that 5 of the specified capacity is freed for new data ü Supervisor rights Measurement data Data base information ð The following is displayed Current database size in Byte Measurement values Number of measurement values in the database Max ...

Page 79: ...ll find details Accessories Bus module ð If a bus module is connected you will find details 6 7 4 Retrieve information about the device Diverse information on the device is shown Software and serial numbers network information and operating hours Device Identification Device Network Device Operating hours 6 7 5 Call information on the assemblies Diverse measurement values and information to the fo...

Page 80: ... the information to the voltage is shown Energy Voltage 2 ð In this window the second part of the information to the voltage is shown Energy Power 6 7 7 Call information on the HYDRO S UL3000 Fab PLUS only The internal parameters for HYDRO S are displayed HYDRO S 6 7 8 Call information on the SL3000 Sniffer line UL3000 Fab PLUS only Sniffer line 6 8 Log 6 8 1 Call the error and warning log Logs Er...

Page 81: ...You are able to get a quick overview of the actual settings of the device and you can make modifications if needed ü You have the required right to change the specific parameter 1 Sets of parameters Parameter list ð The device settings will be displayed as a list 2 Modify individual parameters if needed 3 Save To modify parameters press alternatively a subheading in the list A separate setting win...

Page 82: ...context menu of a created set of parameters press the desired set of parameter and choose to view further details concerning the parameters contained If parameters do not match actual device settings an orange dot will be displayed If there is a missing setting a red dot will be displayed after a software update for example We recommend to view the missing setting to create a new set of parameters...

Page 83: ...s own independent versions number 6 10 1 Update the user interface software Import software updates using a USB flash drive NOTICE Data loss due to an aborted connection Do not switch off the device and do not remove the USB flash drive while the software is being updated ü Supervisor rights 1 Copy the file into the main directory of a FAT32 formatted USB flash drive 2 Connect the USB flash drive ...

Page 84: ...software version press on the button Update ð After completion there is an automatic restart of the system 6 10 3 Update the software in expert mode ü Supervisor rights 1 Update Update operating unit basic unit Expert ð Software versions already available on the device are shown in a list 2 Highlight any of the software versions as required and proceed to step 5 ð Resetting to an older software ve...

Page 85: ...sure gauge 5 V1 V10 Solenoid valves for controlling gas flows 10 Turbo molecular pump 6 12 Resetting to factory settings You can restore the device to factory settings Loss of settings and measurement data After resetting to factory settings only the manufacturer factory settings are in the memory of the device The software of the device is not reset when restoring the factory settings ü Superviso...

Page 86: ...e 1 Press your name which is displayed in the upper left corner of the display or select User accounts ð The window User accounts opens See also Modify Personal Settings 49 2 You log off from the device via the button Log off ð The login window opens 6 14 Switching off the device You can switch off the device with the power supply switch at any time The parameters set in the device remain saved ...

Page 87: ... the instrument is not interrupted For details about the cause and the remedy press To close a warning message press the button Clear after reading Error messages Errors are events that force the interruption of the operation For details about the cause and the remedy press Once you have found the cause for the error continue operation by pressing the button Clear Active errors and warnings This m...

Page 88: ... have been initialized A software update introduced new parameters Confirm the warning message Check that the message does not appear when you restart the device Check whether the factory settings comply with the new parameters of your application The EEPROM on the VI Board was replaced Confirm the warning message Check that the message does not appear when you restart the device Check whether the...

Page 89: ...dule Bus module connection on the device defective Contact customer service W125 I O module no longer connected Connection to I O module interrupted Check the connection to the I O module Replace the connection cable to the I O module I O module defective Replace the I O module I O module connection on the device defective Contact customer service W127 Wrong bootloader version The bootloader is no...

Page 90: ...basic unit and the control panel Contact customer service W171 CU1000 not supported A CU1000 cannot be used with this device Disconnect the CU1000 from this device W201 Voltage U24V_MSB too low Malfunction of 24V power supply unit Contact customer service Short circuit or overload in the 24V supply Contact customer service W202 Voltage U24V_MSB too high Malfunction of 24V power supply unit Contact...

Page 91: ...ut of range Short circuit or overload in the internal 5V supply Contact customer service W212 5V sniffer line supply voltage out of range Sniffer line defective Use another sniffer line if possible Contact customer service Short circuit or overload in the 5V sniffer line supply Contact customer service W221 Internal voltage 24V_RC voltage out of range The remote control is defective Use another re...

Page 92: ...irani voltage out of range Short circuit or overload in the 24V_PRESSURE Pirani supply Contact customer service W240 Voltage 15V out of range Short circuit at preamplifier Contact customer service VI Board or MSB defective Contact customer service W241 Voltage 15V out of range Short circuit at preamplifier Contact customer service VI Board or MSB defective Contact customer service E242 15V or 15V ...

Page 93: ... low Short circuit between anode and cathode Contact customer service VI Board or MSB defective Contact customer service W305 Anode cathode voltage too high MSB defective Contact customer service E306 Anode voltage wrong The anode voltage set value is outside the allowable range Perform a calibration Contact customer service MSB defective Contact customer service W310 Cathode 1 broken Cathode defe...

Page 94: ... defective or cable not connected Contact customer service W358 Alternate preamplifier ranges Preamplifier defective Contact customer service Unusual leak rate waveform Contact customer service W359 Overdriven preamplifier Ion source or preamplifier defective Contact customer service Mass spectrometer contaminated Contact customer service W360 Preamplifier output too low Ion source bad Contact cus...

Page 95: ... service TMP bearing damage Contact customer service E410 TMP temperature too high The ambient temperature is too high Turn off the device and let it cool down Reduce the temperature in the environment in which the device stands Air filter dirty Clean the air vents or replace the filter plates Fan blocked or defective Contact customer service W411 High TMP temperature The ambient temperature is to...

Page 96: ...mp rotation speed too low No run up of backing pump Contact customer service E500 Pressure sensor p1 not connected Pressure sensor not connected or cable defective Contact customer service VI Board or MSB defective Contact customer service E502 Pressure sensor p2 not connected Pressure sensor not connected or cable defective Contact customer service VI Board or MSB defective Contact customer servi...

Page 97: ...pillary is much too low Leaks may not be detectable Filter is dirty Replace the sniffer tip filter Sniffer tip or capillary blocked Remove the blocking of the sniffer tip Use another sniffer line if possible Contact customer service The pressure limit for a blocked capillary is set too high Check and change the pressure limit if necessary W542 Flow through capillary too high Capillary broken or le...

Page 98: ...the connection to the test object Check the tightness of the connection between the leak detector and the test object Use another test object if possible The settings value for the max evacuation time until measurement is too low Check and change the max evacuation time until measurement if necessary W630 Calibration request Operation mode or mass has changed Perform a calibration HYDRO S has been...

Page 99: ...s too high The ambient temperature is too high Reduce the temperature in the environment in which the device stands Air filter dirty Clean the air vents or replace the filter plates Fan blocked or defective Contact customer service W710 MSB temperature is too high The ambient temperature is too high Reduce the temperature in the environment in which the device stands Air filter dirty Clean the air...

Page 100: ... Maintenance interval for sniffer tip filter exceeded Contact customer service W910 Maintenance Backing pump Maintenance interval for backing pump exceeded Contact customer service W920 Maintenance Exhaust filter Maintenance interval for exhaust filter exceeded Contact customer service W925 Maintenance Air filter Maintenance interval for air filter exceeded Contact customer service ...

Page 101: ...annot be switched back on unintentionally Do not open the side walls of the device 8 1 Cleaning the housing Wipe the housing with a soft damp cloth Use only water to moisten Avoid cleaners that contain alcohol fat or oil 8 2 Change the filter mat inside the tool box Filter mat tool box Required tools None Depending on the location the filter mat in the tool box can become dirty Check the filter ma...

Page 102: ...mat bottom of the device Required tools Screwdriver Check the filter mat periodically and change it if the filter mat is significant dirty ü They consist of a new filter mat 1 Make sure that the device is disconnected from the power supply by pulling the power plug securely 2 To reach the filter mat loosen the knurled screw on the front of the device at the bottom 3 Remove the metal sheet with the...

Page 103: ...00 Fab Operating instructions iina73en1 08 1910 103 140 4 Loosen the screws which fix the filter mat on the metal sheet 5 Replace the filter mat 6 Secure the filter mat with the screws insert the metal sheet and fix it with the knurled screw ...

Page 104: ...6 Gasket A blockage of the sniffer tip can have the following causes Capillary filter blocked replace felt discs or capillary filter Sinter filter clogged check or replace sinter filter Capillary clogged in sniffer tip replace sniffer tip Sniffer tip damaged replace sniffer tip Sniffer line damaged blocked replace SL 200 Replace felt discs or capillary filters Switch off the leak detector or disco...

Page 105: ...ing replace sinter filter including gasket Fig 16 Sintered filter heavily soiled 5 Tighten the sniffer tip again ð The sniffer line is ready to be used again If you have activated the display of maintenance requests set the maintenance interval to the desired new period Also see Activate or deactivate maintenance requests 59 and Set maintenance interval Filter sniffer tip or Air filter 58 8 5 Repl...

Page 106: ...ter or the water conservation tip Make sure that the cone seal does not fall out 3 Push out the old filter pads and the metal grill from the rear Fig 17 Pressing the filter inserts out of the capillary filter 4 Dispose of the old inserts and clean the metal grill 5 Push the metal grill and then the two new inserts into the filter from the front Make sure that grill and inserts do not cant 6 Switch...

Page 107: ...ip 6 Tighten the sniffer tip again 7 Switch on the leak detector 8 Close the sniffer probe with your finger You should be able to feel the underpressure If not then there is a leak somewhere and you have to check sniffer probe and handle 9 If necessary set the maintenance interval to the desired new period See also Set maintenance interval Filter sniffer tip or Air filter 58 8 6 Creating screensho...

Page 108: ...tten when another screenshot is taken 8 7 Sending for repair or maintenance Maintenance inside the device should only be performed by the manufacturer We recommend having the device serviced every 4000 hours or annually You can send in your device to INFICON so it can be maintained or repaired For further details see Sending in the device 110 ...

Page 109: ...an the valve block 2 X 2 III Replace filter of vent and purge gas line 1 X1 X1 X1 II III 200000683 200001095 Exhaust filter UL3000 check drain X X X X X II III Replace filter cartridge X1 X1 X1 II III 200000694 Electrical Fan subassemblies Blow out fan chassis and TMP 1 X1 X1 X1 X1 II Check air filter kit and replace if necessary 1 X1 X1 X1 X1 I 200007656 Explanation of the maintenance plan I Serv...

Page 110: ...er the health The contamination declaration serves to protect all persons who come into contact with the device Fill in the declaration of contamination completely 1 Please contact the manufacturer and send a completed declaration of contamination before sending anything to us ð You will then receive a return number 2 Use the original packaging when returning 3 Before sending the device attach a c...

Page 111: ...INFICON Decommissioning the measuring instrument 9 UL3000 Fab Operating instructions iina73en1 08 1910 111 140 ...

Page 112: ...000 sniffer line for UL3000 Fab PLUS SL3000 3 sniffer line 3 m length 525 001 SL3000 5 sniffer line 5 m length 525 002 SL3000 10 sniffer line 10 m length 525 003 SL3000 15 sniffer line 15 m length 525 004 Holder for sniffer line SL3000 551 203 Sniffer line for system integration robotic application 525 015 Sniffer tip for the SL3000 Sniffer tip ST312 120 mm long rigid 12213 Sniffer tip FT312 120 m...

Page 113: ...chamber TC1000 551 205 Search gas spray gun with hose 16555 Sniffer line SL200 By using the sniffer line the leak detector can easily be converted to a sniffer leak searcher The length of the sniffer line is 3 8 m To operate this sniffer line you also need a cable extension for the electrical connection For mounting the hooks for winding up the power line or sniffer line see Connect the supplied a...

Page 114: ...tector at a distance of up to 100 m Via remote control you control the functions START STOP VENT STOP Ventilate ZERO background The measured leak rate is displayed as a bar graph as a numeric value or as a diagram on the display of the remote controls see the RC1000 Technical Manual Measurement values you create over a recording time of up to 24 hours in the internal memory of the RC1000 You trans...

Page 115: ...c signals 3 To stop signals from being emitted after finding the remote control select OFF in the Paging request field Test chamber TC1000 This test chamber converts the leak detector to a complete workstation where hermetically sealed components can be tested Also as per Standard MIL STD 883 testing can be performed easily quickly and accurately The tests start automatically once the cover of the...

Page 116: ...10 Accessories and interfaces INFICON 116 140 UL3000 Fab Operating instructions iina73en1 08 1910 Fig 21 Test chamber TC1000 ...

Page 117: ... Off Pressure p1 Pressure p2 Leak rate mantissa Leak rate exponent Leak rate linear Leak rate logarithmic Leak rate mantissa hyst and Via interface 3 Set up the Analog output 2 ð You can choose from Off Pressure p1 Pressure p2 Leak rate mantissa Leak rate exponent Leak rate linear Leak rate logarithmic Leak rate mantissa hyst and Via interface 4 Set up the Analog output scaling ð You can choose fr...

Page 118: ...terfaces Leak rate log 0 10 V logarithmic in the selected unit The upper limit 10 V and the scale V decades are set via the parameters Exponent upper limit and Analog output scaling For example Upper limit set to 1 x 10 5 mbar l s 10 V Scale set to 5 V decade The lower limit is thus 1 x 10 7 mbar l s 0 V The logarithmic output function of both the slope in V decade as well as the upper limit 10 V ...

Page 119: ...e are available for selection To mode Inverse In the following table overview the arrow pointing the transfer direction in the column Transition must be reversed 5 Save Function Transition Description Vent inactive active Vent inlet only in standby state CAL inactive active active inactive Start calibration Apply value for background and finish calibration No function The input is not functioning ...

Page 120: ...ption of the state closed 5 Save Function State Description Off open open always open Ready for operation closed Emission switched on calibration process inactive no error open Emission switched off or calibration process active or error Emission on closed Emission switched on open Emission switched off Error closed Error open No error Error or warning closed Error or warning open No error or warn...

Page 121: ...int 2 open Measured leak rate undercuts the setpoint 2 Setpoint 3 closed Measured leak rate exceeds the setpoint 3 open Measured leak rate undercuts the setpoint 3 Setpoint 4 closed Measured leak rate exceeds the setpoint 4 open Measured leak rate undercuts the setpoint 4 Purge closed Purge valve open open Purge valve closed Vent closed Internal vent valve open open Internal vent valve closed Stan...

Page 122: ...tector and the bus module proceed as follows 1 Switch off the leak detector 2 Connect the INFICON bus module via a data cable to the LD socket of the device see Connections for accessories and control signals 29 3 Switch on the leak detector 4 Setup Accessories Device selection 5 Select the Bus module as device 6 Confirm with 10 3 2 Setting a bus module address You can set the setpoint for the fie...

Page 123: ...ternet This is true for connections over WLAN as well as over Ethernet However if you want to access the web interface of the leak testing remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties 10 4 1 1 Configure the LAN connection of the leak detector ü Supervisor righ...

Page 124: ...mend using a current version of the web browser Chrome Firefox or Safari To access the leak tester from the PC or tablet web browser enter the IP address of the leak detector as follows http IP address ð The current active user interface of the leak detector is called ð The same functionality is available on the PC or Tablet as on the touchscreen of the leak detector 10 4 1 3 Allow client access ü...

Page 125: ...he web interface of the leak testing remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties In order to be able to access the user interface of the device via WiFi there needs to be a WiFi capable USB adapter with WiFi Access Point technology inserted in the rear of the...

Page 126: ...eps then on most devices it is sufficient just to enter the URL ü A wireless LAN capable USB adapter with wireless LAN Access Point Technology is connected to a USB port of the leak detector see Control unit 21 ü In the configuration of the leak detector the option Enabled is activated see Configure the wireless LAN connection of the leak detector 125 ü The WLAN connection is automatically detecte...

Page 127: ... by PC or Tablet activate the Client Access option ð If the option Client Access is not activated the leak detector cannot be operated via PC or Tablet No settings can then be changed 3 Save Display of all connected clients ü The network connection between the leak detector and one or more PCs or Tablets has been established see Setting the wireless LAN connection in the PC or Tablet 126 Setup Net...

Page 128: ...and warnings ð Can only be seen when active 3 Data recording 4 Measurement data Data base information 5 Measurement data Measurement cycles 6 Measurement data export 7 Update Update operating unit 8 Update Update operating unit Expert 9 Update Update basic unit 10 Update Update basic unit Expert 11 Vacuum diagram 12 Logs 13 Logs Result log 14 Logs Maintenance 15 Logs Errors and warnings 16 Logs Ca...

Page 129: ...mits 20 Setup Measurement HYDRO S 21 Setup Measurement Mass 22 Setup Measurement Calibration leak 23 Setup Measurement Sniff 24 Setup Measurement Sniff Capillary surveillance 25 Setup Measurement Sniff SL3000 sniffer line 26 Setup Measurement Protection 27 Setup Measurement Miscellaneous 28 Setup Measurement Vacuum 29 Setup Measurement Vacuum Vacuum ranges 30 Setup Measurement Vacuum Auto Leak Tes...

Page 130: ...tputs configuration 48 Setup Accessories I O module Digital inputs configuration 49 Setup Accessories RC1000 50 Sets of parameters Parameter list 51 Sets of parameters Manage sets of parameters 52 Setpoints 11 1 3 Information 1 Assemblies 2 Assemblies Ion source 3 Assemblies MSB 4 Assemblies TMP 5 Assemblies Backing pump 6 Assemblies Preamplifier 7 Energy 8 Energy Power 9 Energy Voltage 1 10 Energ...

Page 131: ... Fab Operating instructions iina73en1 08 1910 131 140 21 Measurements Runtime 22 Measurements Leak rate and pressure 23 Measurements Temperature 24 Sniffer line 25 Accessories 26 Accessories Bus module 27 Accessories I O module ...

Page 132: ...11 Appendix INFICON 132 140 UL3000 Fab Operating instructions iina73en1 08 1910 11 2 CE Declaration of Conformity ...

Page 133: ...INFICON Appendix 11 UL3000 Fab Operating instructions iina73en1 08 1910 133 140 ...

Page 134: ...11 Appendix INFICON 134 140 UL3000 Fab Operating instructions iina73en1 08 1910 ...

Page 135: ...n leak 73 Cleaning works 101 Connecting sniffer line SL200 17 27 Connecting sniffer line SL3000 17 D Declaration of Contamination 110 Definition of terms 9 Display background leak rate 53 Display leak rate and pressure 78 Display maximum leak rate 22 Display runtimes 79 Display temperature value 79 E Evacuation time gross leak 58 Evacuation time measurements 58 F Factory settings 31 Function descr...

Page 136: ...ilation mode 68 Set external calibration leak 66 Set of parameters Delete 82 load 82 Setting setpoints 62 Setting the language 49 Sniffer line Pressure monitoring 71 Replacing the filter 104 Sniffer line SL200 113 Sniffer line SL3000 113 Software Update basic unit 83 User interface update 83 Supervisor 48 50 Switch OFF 86 Switching on 47 T Take a screenshot 107 Technical data 30 Test chamber TC100...

Page 137: ...INFICON Index UL3000 Fab Operating instructions iina73en1 08 1910 137 140 Z ZERO 74 Button 23 Factory setting 67 ...

Page 138: ...Index INFICON 138 140 UL3000 Fab Operating instructions iina73en1 08 1910 ...

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