6 | Operation
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UL3000-Fab-Operating-instructions-iina73en1-08-(1910)
6.3.2 Select gas
DANGER
Danger from a Hydrogen explosion
Hydrogen can explode in combination with oxygen. The allowable composition of
venal gas mixtures can be read in the safety data sheets of the respective
manufacturers.
► Ensure that the share of hydrogen does not exceed the described concentration.
ü
Supervisor - rights
1
> Setup > Measurement > Mass
2
Make a selection from:
"Hydrogen" H
2
(2 amu)
"Helium"
4
He (4 amu)
"Mass 3"
3
He (3 amu)
3
Save
.
6.3.3 Setting setpoints
You can set the leak rate for the setpoint to 1, 2, 3 and 4 separately.
When the setpoints are exceeded:
• If the setpoint 1 or 2 is exceeded, the measurement line in the measurement
window changes color.
• The setpoint relay of the digital output switches, see also "I/O module [
the interface description.
Also setpoint 1 defines the trigger point for the different alarms, see also "Change
56]". It is also the limit for I•ZERO, see “Set and use the function
ü
Operator or Supervisor rights
1
> Setpoints
2
Set up.
3
Save
.
6.3.4 Activate vacuum ranges
Vacuum ranges
You can activate the vacuum ranges MASSIVE, GROSS, FINE and ULTRA for your
measurements.
All 4 areas can be activated at the same time. If several areas are activated, they
switch automatically depending on the inlet pressure. In this way different sensitivities
can be measured with.
Summary of Contents for ULTRATEST UL3000 Fab
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