
ALARM
CODE
POSSIBLE
CAUSES
CORRECTIVE
ACTION
11
Long
Dry
Time
Leak
in
chamber
or
associated
fittings
and
valves,
including
vacuum
hose
to
the
WRS
Contact
a
qualified
maintenance
technician
to
inspect
solenoid
valves
and
manual
valves
for
leaks.
Inspect
fittings
for
leaks.
Inspect
vacuum
hose
(white
‐
tagged
hose)
to
WRS
for
leaks.
Repair
as
needed.
12
Vacuum
Test
Failed
Leak
in
chamber
or
associated
fittings
and
valves,
including
vacuum
hose
to
the
WRS
Contact
a
qualified
maintenance
technician
to
inspect
solenoid
valves
and
manual
valves
for
leaks.
Inspect
fittings
for
leaks.
Inspect
vacuum
hose
(white
‐
tagged
hose)
to
WRS
for
leaks.
Repair
as
needed.
NOTE:
Reference
Appendix
A.5
Vacuum
Leak
Test
troubleshooting
guide
for
more
help
on
troubleshooting
a
potential
leak
in
the
system.
13
Fuse
F3
‐
Inputs
Overcurrent
Faulty
fuse
Contact
a
qualified
maintenance
technician
to
correct
cause
of
overcurrent
and
replace
fuse
F3.
Contact
a
qualified
maintenance
technician
inspect
and
replace
fuse
F3.
14
Fuse
F5
‐
Outputs
Overcurrent
Faulty
fuse
Contact
a
qualified
maintenance
technician
to
correct
cause
of
overcurrent
and
replace
fuse
F5.
Contact
a
qualified
maintenance
technician
to
inspect
and
replace
fuse
F5.
15
Door
Opened
Alarm
Door
opened
during
a
cycle
Fiber
optic
door
switch
failure/fault
Reset
and
rerun
cycle.
Contact
a
qualified
maintenance
technician
to
inspect
and
replace
fiber
optic
cable
and/or
mini
‐
beam
sensor
or
adjust
fiber
optic
cable
at
door.
66
Summary of Contents for P2131
Page 121: ... THIS PAGE INTENTIONALLY LEFT BLANK 115 ...
Page 130: ...SECTION A APPENDIX 124 ...
Page 131: ...A 1 Swagelok Fitting Installation Instructions 125 ...
Page 135: ...A 2 PLC Data Sheet 129 ...
Page 141: ...A 3 VERIFY Product Information 135 ...
Page 147: ...A 4 WRS Pump Information 141 ...
Page 158: ...A 5 Vacuum Leak Test Troubleshooting Guide 152 ...