
NOTE:
The
Stainless
‐
Steel
braided
hose
used
for
S/N’s
AFS
‐
0001
through
AFS
‐
0354
has
been
changed
to
a
clear
PFA
hose,
starting
with
S/N
AFS
‐
0355
.
There
are
no
changes
to
maintenance
procedures
or
replacements
of
fittings.
For
future
hose
replacements,
new
PFA
hose
will
be
sent
pre
‐
swaged
and
ready
for
installation.
Vacuum
exhaust
hoses
from
the
chamber
drain
to
the
rear
bulkhead
remain
the
same.
Left
Side
of
SMU
Vacuum/Exhaust
Valve
(SV
‐
2)
(P/N:
P2131
‐
1
‐
0025)
Hose,
Chamber
Vent
‐
In
(P/N:
P2131
‐
1
‐
3117)
Hose,
Vent
Break
Valve
(P/N:
P2131
‐
1
‐
3111)
Hose,
Chamber
Vent
‐
Out
(P/N:
P2131
‐
1
‐
3118)
Hose,
Jacket
Vent
‐
Out
(P/N:
P2131
‐
1
‐
3115)
Hose,
Jacket
Fill
(Not
Shown)
(P/N:
P2131
‐
1
‐
3107)
Hose,
Jacket
Vent
‐
In
(P/N:
P2131
‐
1
‐
3116)
Hose,
Level
Switch
(P/N:
P2131
‐
1
‐
3106)
HEPA
Filter
(P/N:
P2131
‐
1
‐
0028)
Vacuum
Break
Valve
(SV
‐
4)
(P/N:
P2131
‐
1
‐
0027)
Vacuum
Break
Valve
(SV
‐
3)
(P/N:
P2131
‐
1
‐
0026)
Hose,
Vacuum
Valve
‐
In
(P/N:
P2131
‐
1
‐
3113)
Hose,
Vacuum
Valve
‐
Out
(P/N:
P2131
‐
1
‐
3114)
106
Summary of Contents for P2131
Page 121: ... THIS PAGE INTENTIONALLY LEFT BLANK 115 ...
Page 130: ...SECTION A APPENDIX 124 ...
Page 131: ...A 1 Swagelok Fitting Installation Instructions 125 ...
Page 135: ...A 2 PLC Data Sheet 129 ...
Page 141: ...A 3 VERIFY Product Information 135 ...
Page 147: ...A 4 WRS Pump Information 141 ...
Page 158: ...A 5 Vacuum Leak Test Troubleshooting Guide 152 ...