Sabio 2010D, Руководство по эксплуатации

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Internal Calibrations Page 8-6
manufacturer’s physical calibration, default calibration
coefficients can be entered in the New Coefficients screen.
Default coefficients are calculated as follows:
a = 0
b = Max Flow / 5
c = 0
Where Max Flow = Full scale flow of the MFC in SCCM
Note that, although the
2010D
allows the units of measure to be
selected in most screens, all calibration coefficients are based
on units of SCCM for flows and PPB for ozone.
Manually Entering a Calibration Table
Selecting New Table from the calibration menu allows data from a
previous calibration to be re-entered without the need for an
interactive calibration. Also, if a new mass flow controller is
installed in the
2010D
, a calibration table based on the MFC
manufacturer’s data may be entered by selecting the New Table
option from the calibration menu.
Figure 8-4 New Calibration Table