Specifications and External Dimensions
ZW-8000/7000/5000
User's Manual
289
9
APPE
NDICE
S
*1:
Indicates the distance from the front of the sensor head. The pen-shaped right angle type has a maximum individual difference of ±0.15
mm in the distance from the front of the sensor head.
*2:
The measurement range is higher 100
μ
s than measurement cycle.
*3:
Capacity value when OMRON standard mirror surface target is measured at the measurement center distance as the average of 16,384
times
When connected with the Sensor Controller for the Export Control Trade Ordinance (ZW-8000T), the minimum resolution is 0.25
μ
m,
regardless of the Sensor head or setting condition.
*4:
Material setting for the OMRON standard mirror surface target: Error from an ideal straight line when measuring on mirror surface.
*5:
Capacity value defined by 1/e
2
(13.5%) of the peak optical intensity of the measurement wavelength.
*6:
When an extension fiber cable of 2 m or longer is connected, the setting rage of the measurement cycle (exposure time) changes. For
details, refer to
"Setting the Measurement Cycle" p.122
in this manual.
*7:
Actual value of the change in measurement value at the measurement center distance when fastened with an aluminum jig between the
Sensor Head and the target, and with the Sensor Head and the Sensor Controller set in the same temperature environment.
The value in parentheses is the actual value when using an SUS304 jig.
When measuring the thickness, the value is calculated from the difference between the heights of the surface and rear surface, so there is
no effect on the temperature change.
●
ZW-S7010/S7020/S7030/S7040/SP7007/SP7010/SPR7007/SPR7010
Accessories
1 Calibration ROM fixing screws (M2 × 5
mm), Fiber cable protective cap (1), Strap
(1), Instruction Manual, Precautions
Installation plate (1), 4 unit fixing screws (M2 × 10 mm), 1
Calibration ROM fixing screw (M2 × 5 mm), Fiber cable
protective cap (1), Strap (1), Instruction Manual,
Precautions
ZW-S7010
ZW-S7020
ZW-S7030
ZW-S7040
ZW-SP7007 ZW-SP7010 ZW-SPR7007 ZW-SPR7010
Sensor controller
ZW-7000
@
Sensor head type
Square-shaped straight type
Pen-shaped straight type
Pen-shaped right angle
type
Measurement center
distance
*1
10 mm
20 mm
30 mm
40 mm
7 mm
10 mm
7 mm
10 mm
Measuring range
*2
±0.5 mm
±1 mm
±2 mm
±3 mm
±0.3 mm
±0.7 mm
±0.3 mm
±0.7 mm
Static resolution
*3
0.004
μ
m
0.008
μ
m
0.016
μ
m
0.024
μ
m
0.004
μ
m
0.006
μ
m
0.006
μ
m
0.009
μ
m
Linearity
*4
±0.45
μ
m
±0.9
μ
m
±2.0
μ
m
±3.0
μ
m
±0.45
μ
m
±0.7
μ
m
±0.7
μ
m
±1.1
μ
m
Spot diameter
*5
50
μ
m dia.
70
μ
m dia.
100
μ
m dia. 120
μ
m dia. 130
μ
m dia. 170
μ
m dia. 150
μ
m dia. 190
μ
m dia.
Measuring cycle
*6
20
μ
s to 400
μ
s
Operating ambient
illumination
Illumination on object surface max.30000 Lx: (incandescent light)
Ambient temperature
range
Operation: 0 to 50
°
C, Storage: -15 to +60
°
C
(No freezing and condensation)
Ambient humidity
range
Operation/storage: 35 to 85% (No condensation)
Degree of protection
IP40 (IEC60529)
Vibration resistance
(destructive)
10 to 150 Hz (half amplitude 0.35 mm), 80 mins in each of X/Y/Z directions
Shock resistance
(destructive)
150 m/s
2
, 6 direction, 3 times each (up/down, left/right, forward/backward)
Temperature charac-
teristic
*7
0.6
μ
m/
°
C
(0.2
μ
m/
°
C)
1.1
μ
m/
°
C
(0.5
μ
m/
°
C)
1.8
μ
m/
°
C
(1.0
μ
m/
°
C)
2.1
μ
m/
°
C
(1.2
μ
m/
°
C)
0.8
μ
m/
°
C
(0.4
μ
m/
°
C)
0.8
μ
m/
°
C
(0.4
μ
m/
°
C)
0.8
μ
m/
°
C
(0.4
μ
m/
°
C)
0.8
μ
m/
°
C
(0.4
μ
m/
°
C)
LED safety
Risk Group1 (IEC62471)
Material
Chassis: aluminum die cast
Fiber cable sheath: PVC
Calibration ROM: PC
Chassis: SUS
Fiber cable sheath: PVC
Calibration ROM: PC
Mounting Plate: Aluminum
Chassis: SUS, aluminum
Fiber cable sheath: PVC
Calibration ROM: PC
Mounting Plate: Aluminum
Fiber cable length
0.3 m, 2 m (flex-resistant cable)
Fiber cable minimum
bend radius
20 mm
Insulation resistance
(Calibration ROM)
Between case and all terminals: 20 M
Ω
(by 250 VDC)
ZW-S8010
ZW-S8020
ZW-S8030
ZW-SP8007
ZW-SP8010
ZW-SPR8007 ZW-SPR8010
Содержание ZW-7000 Series
Страница 22: ...20 ZW 8000 7000 5000 User s Manual Index 329 Revision History 332 ...
Страница 23: ...ZW 8000 7000 5000 User s Manual 1 21 ...
Страница 54: ...Basic Operations for Displaying Measurement Results 52 ZW 8000 7000 5000 User s Manual MEMO ...
Страница 96: ...Saving a project 94 ZW 8000 7000 5000 User s Manual MEMO ...
Страница 192: ...Saving The Settings 190 ZW 8000 7000 5000 User s Manual MEMO ...
Страница 280: ...Connecting by No protocol Communications 278 ZW 8000 7000 5000 User s Manual MEMO ...
Страница 281: ...8 Troubleshooting Troubleshooting 8 1 Error Messages 280 8 2 Troubleshooting 282 ...
Страница 288: ...Troubleshooting 286 ZW 8000 7000 5000 User s Manual MEMO ...
Страница 289: ...9 APPENDICES APPENDICES 9 1 Specifications and External Dimensions 288 9 2 Laser safety 323 9 3 Firmware Update 324 ...
Страница 330: ...Firmware Update 328 ZW 8000 7000 5000 User s Manual MEMO ...
Страница 333: ...Index ZW 8000 7000 5000 User s Manual 331 9 APPENDICES ...
Страница 335: ......