NF ZA57630, Инструкция по эксплуатации

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5.8 Measurement Accuracy
5
-
26
ZA57630
・
K
B
: DC bias coefficient [%]
When the normal DC bias setting is 0.00 V, K
B
= 0%.
The K
B
[%] when the normal DC bias is output from the front panel
H
CUR
/OSC
is as
shown in the table below. This is common for the voltage setting and current setting.
Normal DC bias
Measurement
range
Z
r
Measurement frequency [Hz]
f ≤ 1 k
1 k <
f
≤ 30 k
30 k <
f
≤ 10 M
1 MΩ 5.0 2.0 - - -
100 kΩ 1.0 0.2 2.0
10 kΩ 0.2 0.1 0.2
1 kΩ 0.1 0.1 0.1
100 Ω 0.3 0.3 0.3
10 Ω 0.5 0.5 0.5
The K
B
[%] when the HV DC bias is enabled is as shown in the table below.
HV DC bias
Measurement
range
Z
r
Measurement frequency [Hz]
1 k ≤
f
< 30 k
30 k ≤
f
≤ 10 M
1 MΩ 2.0 - - -
100 kΩ 0.5 2.0
10 kΩ 0.2 0.2
1 kΩ 0.2 0.2
100 Ω 0.5 0.5
10 Ω 0.5 0.5
・
K
T
: Temperature-dependent coefficient
Ambient temperature T[
℃
] K
T
0
～
+18 1
＋
k
×
(18−T)
+18
～
+28 1
+28
～
+40 1
＋
k
×
(T−28)
・
k: Temperature coefficient
Measurement
range
Z
r
Measurement frequency [Hz]
f < 30 k
30 k ≤
f
≤ 1 M
1 M <
f
≤ 5 M
5 M <
f
≤ 10 M
1 MΩ 0.04 --- --- ---
100 kΩ 0.05 0.04 --- ---
10 kΩ 0.05 0.04 0.04 ---
1 kΩ 0.06 0.04 0.06 ---
100 Ω 0.08 0.05 0.04 0.08
10 Ω 0.03 0.02 0.02 ---