
Plasma
Generation
PlasmaQuant MS Series
72
Figure 6-13 - A properly mounted RF generator
6.5.6
Replacing, Aligning, and Adjusting the Plasma Coil
This procedure provides information on how to remove, replace, and align the load
coil.
Figure 6-14 - Replacement plasma coil
1.
Refer to section 6.5.5 to remove the torch and RF generator.
Using the plasma coil alignment tool (Part # 10-500w-001-14), gently thread the
alignment tool into the plasma coils installed on the RF generator.
Plasma coil replacement: