
Electronics
PlasmaQuant MS Series
174
The Electrical box module (10-5-01200004700 / new: 10-5100-300-14) contains
two switch mode power supply PCB's. They generate the +24 V, +15 V, -15 V and
+5 V supplies from a 240 V input.
The Utility box (10-5-0220003800 / new: 10-5100-200-14) is factory configured
as a single phase module. Mains power supplies are distributed from this module to
the following items via one core mains cables.
–
The Electrical box module
–
The quadrupole controller via OEM power supply module
–
The DC power supply module for the RF generator via Electrical box module
–
Rotary pump
The Quadrupole Controller is connected to the mass analyzer. It controls the ratio
and magnitude of the RF and DC signals supplied to the quadrupole.
10.2.2
Vacuum System Functionality
The vacuum system includes one rotary pump, two turbo pumps (each containing a
turbomolecular pump controller), two gauges, and a vent device.
The Aspect MS software displays the status of the vacuum system during pump down.
A thermocouple gauge monitors the pressure at the fore line of the vacuum system
before RP and a Thermo VAC gauge monitors the pressure in VC2. The control signals
from both gauges are connected directly to the system control PCB. The pressure trip
point limits are saved in the instrument firmware.
The following items are connected directly to the system control PCB:
It monitors the vacuum pressure between 2.7 Torr and 1 mTorr at the fore line of
the vacuum.
It’s control signal and power supply is obtained directly from the systems control
PCB.
The thermocouple gauge and the vent device share the same loom from the system
control PCB (P11).
Figure 10-1 - Thermocouple vacuum gauge (G1)
The thermocouple
vacuum gauge (G1):