
Vacuum
System
PlasmaQuant MS Series
102
1.
Vent the vacuum system.
2.
Turn the transmitter off.
3.
Unplug the sensor cable.
4.
Remove the transmitter from the vacuum system and install the protective lid.
In case of severe contamination or a malfunction, the sensor can be replaced.
Transmitter failures due to contamination are not covered by the warranty.
Leybold Vacuum assumes no liability and the warranty becomes null and void if any
repair work is carried out by the end-user or third parties.
7.2.8
Turbo-molecular Pumps Turbo1 and Turbo2
The turbo-molecular pumps (Turbo1 and Turbo2) are OEM units manufactured by
PFEIFFER, Germany. Turbo1 is a PFEIFFER pump and is located on the bottom of the
vacuum chamber, directly connected to VC2. Turbo2 is also a PFEIFFER pump and is
located toward the top of the vacuum chamber, directly connected to VC3.
Each turbo pump has its own dedicated PFEIFFER TC110 pump controller. These
controllers are located on each pump.
The PFEIFFER pump consists of a high frequency motor driving a turbine fitted with
eight bladed stages and three MacroTorr stages. The turbine rotates in a
counterclockwise direction when viewed from the high vacuum flange end.
Figure 7-11 - Inside a turbo-molecular pump
Maintenance, Repair