
Mass
Spectrometer
PlasmaQuant MS Series
122
Figure 8-12 - Extraction lens removal tool
Vacuum feedthroughs provide the DC connections to the extraction lenses. The circular
shaped spring shims are connected to the appropriate feedthrough with an M2 screw.
Take care when tightening the screws because the alumina is brittle. If the glue or the
alumina breaks the vacuum system will leak and the entire feedthrough must be
replaced.
Figure 8-13 - (a) Supplies for E1 and E2 enter the interface assembly via separate vacuum feedthroughs.
The E1 feedthrough is located in the top of the interface assembly while the E2 supply enters from
underneath. (b) The vacuum feedthrough assembly. The E1 and E2 feedthrough assemblies are not
interchangeable.
The mirror is a ring shaped ion lens divided into four segments. Its function is to
position and focus the ion beam onto the entrance lens orifice while rejecting
unwanted particles from the plasma.
The ion mirror