Vacuum
System
PlasmaQuant MS Series
110
Figure 7-16 - PQMS rotary vane pump oil change guide - 2
1.
Ensure the rotary pump has been running for at least 2 minutes prior to
attempting oil change – this will ensure the oil is less viscous.
2.
Remove the oil-fill cap from the pump.
3.
Unscrew the drain plug in the bottom-front of the pump and insert the SV40
drain tool to release the spring. This will allow oil to flow freely from the pump.
4.
When the flow of oil stops, refit the drain plug.
5.
Dispose of the old oil appropriately in accordance with local regulations.
6.
Fill the pump with new rotary pump oil (LVO 200 or LVO 420).
7.
Wipe down the pump to remove excess oil.
8.
Check and replace oil exhaust filter if needed.
7.5.4
Maintaining Turbo-molecular Pumps
The PFEIFFER HiPace 300 does not require any routine maintenance. Only authorized
personnel may carryout maintenance work on these systems. In the case of
breakdown, replace the unit with a new one.
CAUTION
Before returning the system to the manufacturer for repairs or replacement with a
reconditioned unit, the “Health and Safety” sheet must be completed and included
with the faulty unit. Please contact PFEFFER or visit
www.pfeiffer-vacuum.com
for
more information.
PQMS Rotary Vane Pump
optimum oil level and color in SV 40 viewport
remaining oil level after installation
and filling of a new SV 40 pump
Changing the Rotary
Pump Oil