230
5977B Series MSD Troubleshooting and Maintenance Manual
9
Parts
Vacuum System
This section lists replacement parts available for the vacuum system. It
includes, O-rings and seals (
on page 230), standard foreline pump
and related components (
dry foreline pump and related components (
on page 235), diffusion pump
and related components (
and turbo pump vacuum system components (
O-rings and seals
Table 18
O-rings and seals
Description
Part number
Calibration valve O-ring (1/4-inch)
5180-4182
KF10/16 seal (foreline pump inlet), Micro-Ion vacuum
gauge
KC16AV
KF10/16 seal (foreline pump inlet and diffusion pump
outlet), Micro-Ion vacuum gauge
KC16AV
KF50 seal (diffusion pump inlet)
0100-1884
Side plate O-ring
0905-1442
Vent valve O-ring (1/4-inch)
5180-4182
Содержание 5977B Series
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Страница 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
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Страница 196: ...196 5977B Series MSD Troubleshooting and Maintenance Manual 7 Analyzer Figure 46 Interface tip seal Interface tip seal ...
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Страница 232: ...232 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 55 Pfeiffer DUO pump ...
Страница 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Страница 243: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 243 Figure 63 Extractor EI ion source ...
Страница 245: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 245 Figure 64 The CI ion source 15 16 ...
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