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Vacuum System
6
5977B Series MSD Troubleshooting and Maintenance Manual
157
Foreline Pump
The foreline pump reduces the pressure in the analyzer chamber so the high
vacuum pump can operate. It also pumps away the gas load from the high
vacuum pump. The foreline pump is connected to the high vacuum pump by a
130-cm hose called the foreline hose. There are four different types of foreline
pumps, the Pfeiffer DUO (
), the MVP-070-3 (
the MVP-070-3C (not shown), and the IDP3 (
foreline pumps are not supported with diffusion pump base MSDs
Figure 26
Pfeiffer DUO foreline pump
Hose to vacuum pump
Ballast control
Fill cap
Exhaust outlet
Power switch
Oil level window
with oil mist filter
Drain plug (on front)
Содержание 5977B Series
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Страница 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Страница 88: ...88 3 CI Troubleshooting ...
Страница 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Страница 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Страница 196: ...196 5977B Series MSD Troubleshooting and Maintenance Manual 7 Analyzer Figure 46 Interface tip seal Interface tip seal ...
Страница 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Страница 232: ...232 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 55 Pfeiffer DUO pump ...
Страница 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Страница 243: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 243 Figure 63 Extractor EI ion source ...
Страница 245: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 245 Figure 64 The CI ion source 15 16 ...
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Страница 258: ... G3870 90003 G7077 90028 Agilent Technologies Inc Printed in USA September 2016 Agilent Technologies ...