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5977B Series MSD Troubleshooting and Maintenance Manual
6
Vacuum System
The diffusion pump transports gas by momentum transfer. The heater boils a
special fluid (a polyphenyl ether) inside the stack. As the vapor pressure
increases, the pump fluid vapor is forced out and downward through nozzles
in the stack. The vapor forced out of these nozzles strikes the gas molecules
that are present. This forces the gas molecules down toward the outlet near
the bottom of the pump. Another nozzle in the stack points directly at the
outlet, and forces the gas molecules out. The vapor condenses on the sides of
the pump, and the liquid drains down to the bottom. The liquid is boiled again,
and is reused continuously.
Figure 34
Diffusion pump parts
Foreline gauge assembly
Foreline gauge cable – part of
high vacuum control cable
Diffusion pump outlet
KF10/16 seal
Foreline hose
and hose clamp
KF10/16 clamp
Содержание 5977B Series
Страница 1: ...Agilent Technologies Agilent 5977B Series MSD Troubleshooting and Maintenance Manual ...
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Страница 33: ...Introduction 1 5977B Series MSD Troubleshooting and Maintenance Manual 33 ...
Страница 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Страница 88: ...88 3 CI Troubleshooting ...
Страница 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Страница 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Страница 196: ...196 5977B Series MSD Troubleshooting and Maintenance Manual 7 Analyzer Figure 46 Interface tip seal Interface tip seal ...
Страница 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Страница 232: ...232 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 55 Pfeiffer DUO pump ...
Страница 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Страница 243: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 243 Figure 63 Extractor EI ion source ...
Страница 245: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 245 Figure 64 The CI ion source 15 16 ...
Страница 250: ...250 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 67 CI GC MSD interface ...
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Страница 258: ... G3870 90003 G7077 90028 Agilent Technologies Inc Printed in USA September 2016 Agilent Technologies ...