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5977B Series MSD Troubleshooting and Maintenance Manual
6
Vacuum System
Foreline Gauge
The foreline gauge monitors the pressure (vacuum) at the exit of the diffusion
pump. The primary function of the foreline gauge is diffusion pump control.
When the foreline pump has reduced the pressure in the analyzer chamber to
below 300 mTorr (0.3 Torr), the diffusion pump is automatically switched on.
If the foreline pressure rises above 400 mTorr (0.4 Torr), the AC board
switches off the diffusion pump heater and the analyzer electronics.
Monitor the foreline pressure from the data system or the LCP.
The foreline gauge is used only with diffusion pump MSDs.
Содержание 5977B Series
Страница 1: ...Agilent Technologies Agilent 5977B Series MSD Troubleshooting and Maintenance Manual ...
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Страница 33: ...Introduction 1 5977B Series MSD Troubleshooting and Maintenance Manual 33 ...
Страница 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Страница 88: ...88 3 CI Troubleshooting ...
Страница 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Страница 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Страница 196: ...196 5977B Series MSD Troubleshooting and Maintenance Manual 7 Analyzer Figure 46 Interface tip seal Interface tip seal ...
Страница 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Страница 232: ...232 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 55 Pfeiffer DUO pump ...
Страница 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Страница 243: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 243 Figure 63 Extractor EI ion source ...
Страница 245: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 245 Figure 64 The CI ion source 15 16 ...
Страница 250: ...250 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 67 CI GC MSD interface ...
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Страница 258: ... G3870 90003 G7077 90028 Agilent Technologies Inc Printed in USA September 2016 Agilent Technologies ...