Versum Materials 161133, Installation, Operation & Maintenance Manual

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MNL000423.doc Revision 01 09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Although the Power Supply Module and Source Cup Assembly processors have
separate tasks, they work together to act as one system and communicate between
themselves via an RS485 link. The system architecture is implemented in a peer-to-
peer configuration.
5.1.1
Power Supply Module Overview
The Power Supply Module microprocessor controls the following functions:

Monitors the analog-to-digital converter inputs for all peripheral I/O

Remote analog set point

Analog level and temp voltage outputs

Control of all digital-to-analog converter outputs

Information processing and alarm status monitoring for the Source Cup
Assembly processor

Heater and cooler power control

Safety interlock control circuitry for heater/cooler circuit

Tool IO interface (DDC)

Interface to Remote Display Module

Monitors DC power quality

Remote LCD/keypad interface