MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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* C O P Y R I
G H T
2 0 0 8 *
0 8 /
0 6 /
0 8
V 1 .
3 2
The second row has the release date and version number for firmware validation.
5.6.3
Main Screen
Configurable for two display formats.
L :
0 1 1 %
T :
0 0 0 .
0 º
C
P W R
O F F
S P :
0 2 5 .
0
This view allows for the set point to be displayed as well as the status of the
TEC/Heater power. The power on/power off will follow the green light on the rocker
switch on the front panel.
The numbers adjacent to “SP:” is the current set point of the temperature
controller. The set point parameter will be replaced by any alarm text
message.
The number on the top left corner adjacent to the “L:” is the quartz or S.S.
container liquid level. In this quartz design, there are 8 discrete levels.
Thedisplay will update from one percentage level to the next as the
chemical transitions past the next lower sensing position on the Source
Cup Assembly.
The number adjacent to “T:” is the bubbler temperature from the thermowell.
The bottom left section is a power status indicator for the heater/cooler.
When the Power Supply Module is applying power to the heater/cooler
circuits, the display will read “PWR ON”.
