MNL000426.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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1
Chapter
8
VaporGuard® Stainless Steel Source Configuration
8.1
Introduction
This section of the manual describes the Stainless Steel (S.S.) Source container
when used with the VaporGuard® Absolute Control System.
8.2
Description
The VaporGuard® Source Cup Assembly, (VG600 series) has been designed to control
the temperature and monitor the liquid level of the chemical within a S.S. container.
Higher temperatures can be achieved with the same VaporGuard® without control
degradation.
The VaporGuard® configurations are factory set by models. The difference between
the two configurations is the thermal cutoff and maximum temperature setting, refer to
Table 5.3 Thermal Cutout Switch Configuration.
Level monitoring by the VaporGuard® is only available with the Ultrasonic probe built
into the S.S. containers, refer to figure 8-2.
NOTE:
S.S. containers configure with the quartz level sense optical probes are not
compatible with the VaporGuard® and level monitoring cannot be used. A
stand alone Level Sense Module is required to monitor chemical level or bulk
refill will need to be installed. Contact your Versum Materials, Inc.
representative for additional information.
The VaporGuard® is configured to monitor the levels in the stainless steel container
options, refer to table 2-1 for model types for using with S.S. containers that has the
Ultrasonic Level Probe installed. The Ultrasonic Level probe is connect to the
VaporGuard® level sense circuit for the S.S. container, refer to figure 8-1.