Versum Materials 161133, Installation, Operation & Maintenance Manual, Page: 55 / 191

MNL000423.doc Revision 01 09/18/2018
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5.1.2
Source Cup Assembly Overview
The Source Cup Assembly microprocessor controls the following functions:

Bubbler temperature feedback

Interface to local LCD/keypad
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Backlight control

Audible annunciation

Fan speed monitoring

Communication and alarm status monitoring from the power supply processor

Heater/cooler power safety interlock for over-temperature and correct bubbler
orientation/probe installation

Start/Stop switch interlock

8 position level sensors for quartz bubbler applications

4 level Ultrasonic detector for Stainless Steel applications

Level sense configuration parameters
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PID loop control parameters

Alarm enable/disable features

Password protected screens

Enabling of Remote Display Module

Enabling remote analog set point control