Versum Materials 161133, Installation, Operation & Maintenance Manual, Page: 131 / 191

MNL000424.doc Revision 00
08/26/2016
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Table 6‐1 Power / Signal Interconnect Interface
A1&A2 J4 Power/Signal Interconnect
Cable connector dimensions: 2.9x0.9” (7.4x2.3cm)
Pin # Signal name Signal definition
A1 TEC Power- Cooling power-
A2 TEC Power + Cooling power +
A3 Heater Ground Heater power return
A4 Heater Voltage Heater power +
1 +24V system power input Power for electronics
10 Signal ground 24V return
2 RS485 OUT1 Comm link output
11 RS485 OUT2 Comm link output
3 +24VDC switched Auxiliary power
12 Safety Interlock Signal Req’d to control Temp
4 RS485 IN1 Comm link input
13 RS485 IN2 Comm link input
5 GNDD Signal ground
14 +5VDC Microprocessor power
6 No connection No connection
15 Cable interlock to pin 7 Shorted to pin 15
7 Cable interlock to pin 15 Shorted to pin 7
16 JTAG PORT1 Comm port pin
8 JTAG PORT2 Comm port pin
17 JTAG PORT3 Comm port pin
9 JTAG PORT4 Comm port pin