MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Exit the screen
and save the setting
. With the controller on, the temperature should
move towards the set point temperature. A temperature alarm will trip if the
temperature continues to move out of the temporary set point limits. This may be
caused by the VaporGuard® not being in the START mode or is not operating properly.
Investigate as required.
If other alarms exist, take measures to correct the alarm condition, and then repeat the
clear alarm steps as previously described.
5.5.2
Calibration Check
With the temperature probe connected to the Source Cup Assembly, hold the probe tip
to a temperature sensing device (ex. digital thermometer). This is not a calibration, but
only a check to see if the device is measuring approximately close to a reference value.
The VaporGuard® is calibrated at the factory with a precise, traceable RTD simulator
and can be easily calibrated in the field (if required) with the purchase of a Temperature
Calibration PCA used to simulate several different temperatures, refer to chapter 7.
Contact Versum Materials, Inc. for the purchase of the Temperature Calibration PCA,
PN 146617
.
5.5.3
Temperature Set Point Adjustment
The temperature set point can be adjusted to the desired temperature while the
VaporGuard® is in operation. Press the right arrow key repeatedly to get to the SETUP
screen. Then press the center green button. If the cursor is on the set point, use the up
or down arrows to adjust the temperature setting to the desired value.
If the cursor is on the lower line, press the center button to move to the top line, then
adjust as describe above. Press the red X button to exit the screen and press the
center button to save the settings. Pressing the red X button on the SAVE screen will
exit to the previous menu without saving the settings. Do not turn off the heater/cooler
power switch on the Source Cup Assembly once the set point setting has been
changed, otherwise the until will not reach the set point temperature.
