MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
23
6.4.2
Description of VaporGuard® Alarms
PIN 14: REMOTE TEMPERATURE HIGH 1/LOW 1 ALARM -
This output provides a
signal if the temperature exceeds the set point by the specified number in the set up
screen (in °C) for Temp High 1 and Temp Low 1. This output is high (+5 VDC) when no
alarm condition exists and goes low (< 1.0 VDC) when an alarm occurs.
*PIN 15: LOW CHEMICAL LEVEL ALARM -
This output provides a signal when the
level of chemical in the Bubbler reaches the Low Level setpoint, selected in the set up
screen. This output is high (+5 VDC) when no alarm condition exists and goes low
(<1.0 VDC) when an alarm occurs.
*PIN 16: ANY ALARM -
This output provides a signal if either the temperature is
exceeded from set point or the level of chemical reaches less than percent value
entered in the set up screen OR ANY OTHER ALARM hence the name ANY ALARM.
This output is high (+5.0 VDC) when no alarm condition exists and goes low (<1.0 VDC)
when an alarm occurs.
The TEMP, LEVEL and ANY alarms can be configured to be low (<1.0 VDC) when no
alarm condition exists and goes high (+5 VDC) when an alarm occurs by connecting J5-
2 to ground (J5-22 is digital ground).
*PIN 7: REMOTE TEMPERATURE OUTPUT -
This 0-5 VDC output provides an analog
output with linear correspondence to a Bubbler temperature displayed on the front
panel of the Source Cup Assembly, (0-5 VDC equals 0°C - 110 °C).
*PIN 20: REMOTE LEVEL OUTPUT -
This 0-5 VDC output provides an analog output
in decreasing steps corresponding to the front panel level indication, (0-5 VDC equals 0
-100%).
