MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
8
If the VaporGuard® is mounted in an enclosure or cabinet, allow for a minimum space
requirement of 24” above the Source Cup Assembly for connection of cables, gas lines,
and for replacement of the container. Also, allow spacing (approx. 6” x 6”) for hand
access to the control panel side of the unit. Figures 6-4 and 6-5 show the approximate
height of the inlet and outlet valves when the Versum Materials, Inc. quartz bubbler and
S.S. container is used.
Figure 6‐4
Space Requirements, with Quartz Bubbler, inches [mm]
