Introduction
MNL000418.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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I.2
Emergency Response ‐ 24 Hour Service
If an emergency occurs that cannot be alleviated by the trained operator or his/her
supervisor, call Versum Materials, Inc. on one of these telephone numbers.
From anywhere in the continental United States, Canada and Puerto Rico – 800
523-9374 (toll free).
From all other locations - 610-481-7711.
VERSUM MATERIALS, INC. Operator - 610-481-4911.
European Community/Middle East Gases - +44 500 02 02 02.
Equipment Technical Support – 866-624-7677.
I.3
Definition of Terms
I.3.1
Definitions
There is no industry-standard term for the source container used within each type of
process tool to provide chemical directly to the process. The terms ampoule,
bubbler, source container, and others are all used interchangeably in industry. To
reduce confusion, in this manual the term Bubbler is used to identify the Versum
Materials, Inc. (Schumacher) quartz container (Teflon systems) or the Stainless
Steel Source container (stainless steel systems).
There are three (3) types of notes used in this manual. They are CAUTION,
WARNING, and NOTE. For purposes of this manual, they are defined as:
