MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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40
First line: Input status. When the input is high “1”, the related text will be upper case;
when the input is low “0”, the text will be lower case.
Second line: The description of the input. Move the cursor left or right, the second line
will display the description of the input the cursor is pointing to.
This display is useful when troubleshooting the tool interface.
5.6.12
Fan and Ambient Temperature
The fan speed should be around 80 RPM. If the speed falls below 20%, an alarm will
result.
F A N
A M B
T E M P
X = E X I
T
√ = E X E C U T E
There is also an onboard temperature sensor. It is not as accurate as the one used for
measuring chemical, but is appropriate for determining the ambient conditions of the
installation site.
F A N
8 5
A M B I
E N T
2 3 .
8 º
C
5.6.13
Bar Light
T U R N
O N
B A R L I
G H T
X = E X I
T
√ = E X E C U T E
