MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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5.7.8
Set up Screens
The setup menu contains the set point screens and allows the user to change the set
points to within the limits of the particular model purchased.
S E T U P
S C R E E N
X = E X I
T
√ = E X E C U T E
Press the “√” key will select the temperature set point/flow rate adjust screen. The flow
rate should be chosen to allow the controller to apply the appropriate PID parameters for
better temperature control response. The flow units are in standard cubic centimeters
per minute (sccm) and the default is 250 sccm. For high flow, such as 1000sccm, it is
important that this flow setting be set to the actual flow rate so that the temperature
control may respond optimally.
Pressing “X” will prompt you to save the changes. Press the “√” key save the set point
change. Pressing “X” at the save screen will return the display main menu without saving
the changes.
S E T
P O I
N T
0 2 5 .
0 C
F L O W
R A T E
2 5 0
Using the right (or left) arrow keypad will scroll through the other setup parameters. The
user is prompted to save changes or leave settings unchanged.
5.7.9
PID Settings
This menu allows the user to change the scale factors K for the following PID equation:
Control output=K
p
*e
pv
+ K
i
*∑ e
pv
+ K
d
*(e
pv
- e
pv -1
)
Where:
K
p
= scale factor for proportional and is shown in text as “Heat Proport”