MNL000421.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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3000 seconds (50 minutes).
The smart probe incorporates the over temperature interlock and the probe proximity
interlock. The proximity interlock prevents the VaporGuard® from operating if the
temperature probe is installed incorrectly.
The temperature probe provides the following features:
A fail safe, hard-wired power interlock is tripped when the smart probe is not fully
inserted into the thermowell of the bubbler or the bubbler is misaligned. The
display will flash, an alarm annunciation will sound and the power will be
removed immediately from the heating/cooling elements if this alarm is tripped.
If the temperature probe measurement is outside of the user adjustable min/max
temperature settings (temp low 1 & 2, temp high 1 & 2) an alarm is generated. If
configured to be an interlocked alarm, it will also remove the power to the
heater/cooler circuit when the threshold has been exceeded. This is not a hard-
wired interlock. Temp high/low 1 also has a relay output associated with it.
To remain compliant, the VaporGuard® must be installed in an exhausted enclosure per SEMI S2 app.2 and
F15. Tool interlocks must be in place to remove AC power for LEL vapor detection and/or loss of exhaust
until the on‐ board interlocks are certified completely
The VaporGuard® Trans-LC™ model is designed to accommodate high flow
applications and has been tested to maintain temperature control to within 20
minutes (or less) of start of carrier gas flow (1000sccm).
Versum Materials, Inc. temperature control systems designed for use with
Trans-LC™ require the end-user or OEM tool manufacturer to install certain
safeguards to insure safe handling of Trans-LC™.
WARNING
