MNL000425.doc
Revision 0
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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bubbling, so the sliding of the fixture must be slow and deliberate for output
to change.
7.
If the RTD calibration PCA is available, the user may use it to create specific
temperature readings to validate against the analog output signals.
8.
If the RTD calibration PCA is not available, remove the temperature probe to
achieve a 100ºC reading. Then reconnect and allow measurement to settle on
ambient temperature. Use these two points to verify the temperature output is
within tolerances.
Table 7‐1
Voltage Specifications for Percentage Values
Level %
Volts DC
11%
0.56
23%
1.11
34%
1.67
46%
2.22
57%
2.78
68%
3.34
80%
3.89
91%
4.45
100%
5.00
NOTE:
Volts DC Specifications (±0.05V)
7.3
Safety Test
This test should be performed annually to verify proper function of the safety features for
the VaporGuard®. The VaporGuard® should be powered up with a bubbler installed;
however, the valves should be closed. You will need a digital thermometer with a
thermocouple.
