MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
44
4.
Inspect the Temperature Probe for physical damage.
5.
With the Temperature Probe at ambient temperature, verify the
VaporGuard® displays correct ambient temperature within ~± 2 °C.
6.
Deposit approximately 8-10 drops of the supplied mineral oil into the thermowell.
7.
Install the thermal insulating material onto the bubbler and push down on
the outer sides of the bubbler. Pad should be concaved down onto the
bubbler.
8.
Install Temperature Probe tip in the Bubbler thermowell. Gently push in the
hole until you feel it bottom out on the thermowell bottom.
9.
The Temperature Probe’s proximity sensor will be within 1/2 inch (1.27 cm) or
less from bottom of the Source Cup for proper operation. If this is not achieved
correctly, the VaporGuard® will alarm with a “probe not installed” alarm.
Moving the probe down or rotating the bubbler to land the probe on top of the
magnet. The system will beep to let you know that you are in the correct
location. Clear the alarm from the ALARM CLEAR screen. See Chapter 5.
10.
Using the keypad interface, adjust the temperature setpoint to any
convenient setting between 10 °C and 22 °C. Press the up (START) position
on the front switch. The green LED will illuminate to indicate that control power
is being applied and the system will not begin controlling the bubbler
temperature. Allow the temperature to stabilize. The time required for
temperature
stabilization will vary depending on the temperature range of the system, the
original temperature of the bubbler and the ambient temperature.
NOTE:
If the Temperature Probe is left out of the Bubbler or not installed correctly,
the green LED will not turn on and the bottom half of the switch (red LED)
will be flashing. In addition, the alarm still active will display on the second
row of the LCD interface.
