Introduction
MNL000418.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Introduction
I.1
Introduction to the Manual
This manual covers the Versum Materials, Inc. VaporGuard® Absolute Control
System. The VaporGuard® is a microprocessor-based temperature control system
designed for CVD and diffusion source chemical delivery.
READ THIS MANUAL IN ITS ENTIRITY PRIOR TO INSTALLING OR OPERATING
THE VAPORGUARD® SYSTEM.
It contains information pertinent to setup and operation of the VaporGuard®.
Inspect all shipping containers that are delivered with your shipment to verify that all
parts are available and to acquaint yourself with the system components.
The Chapters and Appendices are organized as follows:
Introduction
Introduction to the Manual and Equipment
Chapter 1
Delivery, Unpacking, and Inspection
Chapter 2
System Components and Specifications
Chapter 3
VaporGuard® Absolute Control System for use with Trans-LC™
Chapter 4
System Safety and Interlocks
Chapter 5
System Operation
Chapter 6
System Installation
Chapter 7
Calibration
Chapter 8
VaporGuard® Stainless Steel Source Configuration
Chapter 9
POCL3 Safe Handling and PPE Matrix
Appendix A
VaporGuard® Troubleshooting Guide
