RF Power Supply and Matching Box
2. Overview
18
Classification
Item
Specification value
MBX-2775L
RF input
Frequency
27.12 MHz
±
0.05%
Rated power
375 W or higher, 7.5 kW or less
Input impedance 50
Ω
RF output
Permissible
output voltage
15 kVpp or less
Permissible
output current
160 A or less
Load impedance Real part: 0.2
Ω
≤
R
≤
8.0
Ω
(However, when within the specified voltage and specified current ranges)
RF output
electrode
Copper plate (3-M6)
* The area near the output electrode is not cooled.
When it reaches high temperatures, cool it to 120
°
C or less.
Matching
accuracy
Residual
reflected wave
power
A value 1% or lower of input traveling wave power or 8 W or less, whichever
is greater.
Cooling
Cooling method Water cooling and air cooling
Water
temperature
5
°
C to 25
°
C
Water volume
2 L/min or more
Water quality
See "Table 2-17 RF system cooling water - Water quality"
Differential
pressure
Approx. 0.15 MPa (at 2 L/min)
Withstand
pressure
0.96 MPa
Internal hose
diameter
1/4 inch
Joint
PT-3/8
Alarm output
Alarm output as "MB FAIL" on the RF power supply
The following alarms are detected with OR (NORMAL OPEN)
1. Panel open contact (maintenance side)
2. FAN sensor (alarm is also output when the matching controller is off)
3. RF connector plugged-in validation contact
4.
Panel open contact (mounting surface)
Ambient temperature during
operation
5
°
C to 40
°
C (However, chamber mounting panel temperature is 60
°
C or
less)
Ambient humidity during
operation
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, vibration
Not containing corrosive gas
Exterior
Exterior dimensions 400 W x 450 D x 300 H (not including protrusions)
Weight
Approx. 20 kg
Table 2-14 Matching box individual specifications
