RF Power Supply and Matching Box
4. Functions
40
4-2-3. Automatic matching controller AMC.EXT pin assignments
Pin
number
Signal name
Contents
Input/
output
1-9
AUTO/MANUAL
switching
Close: Enabled only when ANALOG or PR
·
RC mode
The controller section switches to manual mode,
shifts the positions of the variable capacitors according to
the TUNE/MATCH analog preset input voltage.
Open: Enabled only when ANALOG or PR
·
RC mode
The controller section switches to automatic mode,
and holds the automatic matching state.
(Does not follow the TUNE/MATCH analog preset input voltage)
Input
2-10
BUSY output
Closes by motor operation regardless of automatic/manual
mode
Output
7-15
MANUAL response
Closes when specifying manual mode with an external command Output
3-11
TUNE analog preset
0.1 to 9.9 V/1 to 99% (
±
5%)
Input
(However, does not operate for voltages 0.1 V or lower)
4-12
MATCH analog preset
0.1 to 9.9 V/1 to 99% (
±
5%)
Input
(However, does not operate for voltages 0.1 V or lower)
5-13
TUNE monitor
0 to 99%/0 to 10.0 V (
±
5%)
Output
6-14
MATCH monitor
0 to 99%/0 to 10.0 V (
±
5%)
Output
23-24 STANDBY signal
Closes by input of AC power
Opens at alarm
Output
Table 4-8 Automatic matching controller AMC.EXT pin assignments
