RF Power Supply and Matching Box
5. Operation
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MATCH [50%]
TUNE
[50%]
[ 1]
5-2. Automatic matching controller operation
This section explains the local operation (panel operation) method, remote operation (external control),
and the external preset (external control) method.
5-2-1. Local operation method (panel operation)
1) Operation mode menu
To change the operation mode, press the "ESC" key several times to display the configuration
screen, then select <PANEL> with the left and right keys and press the "ENT" key.
(
AMC-9L/AMC-9LT
operation mode selection screen)
(
AMC-8L/AMC-8LT
operation mode selection screen)
When the setting is complete, the position display screen is displayed.
(Position display screen)
2) Automatic matching operation
Press the "AUTO" button. (The green LED turns on.)
The variable capacitor position operation buttons are now disabled.
The matching operation automatically starts in conjunction with the RF power supply's RF ON
command.
3) Manual matching operation
Press the "MANUAL" button. (The green LED turns off.)
Operate the positions of the variable capacitors with the buttons listed below.
MATCH CCW: Decrease MATCH variable capacitor capacity
MATCH CW: Increase MATCH variable capacitor capacity
TUNE CCW: Decrease TUNE variable capacitor capacity
TUNE CW: Increase TUNE variable capacitor capacity
With RF ON, change the positions of the variable capacitors to minimize the reflected wave
power (Pr).
AMC CONTROL SELECT
<PANEL> PR・RC ANALOG
AMC CONTROL SELECT
<PANEL> ANALOG